EDS/WDS Spectrum Quantification via Automatic Standard Selection
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Solution Overview
Problem
Current methods for determining element concentrations in EDS/WDS spectra rely on manual selection of standard samples, which can lead to inaccuracies due to user experience and do not optimize correction factors for each element, resulting in suboptimal quantification results.
Innovation Solution
A method that calculates a similarity score for each element based on atomic number, absorption, and fluorescence correction factors to automatically select the most suitable standard sample for quantification, ensuring accurate concentration determination by minimizing square deviations and considering concentration reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual selection of standard samples is used, then the process is simple to operate, but the measurement precision deteriorates due to user experience limitations and inability to optimize correction factors for each element
Solution Approach 1:
The system performs automatic standard sample selection and quantification without requiring manual user intervention. The computer automatically identifies suitable standard samples, calculates correction factors, and determines element concentrations based on the stored spectral data and algorithms, eliminating dependence on user experience while maintaining operational simplicity
Solution Approach 2:
The system dynamically calculates and applies element-specific correction factors (atomic number correction Z, absorption correction A, and fluorescence correction F) for each element being analyzed. By optimizing these parameters individually for each element rather than using fixed manual settings, the system achieves higher measurement precision in element concentration quantification
2Measurement precision
If a single standard sample is used for all elements, then the device complexity is reduced, but the measurement precision deteriorates because different elements require different optimal correction factors
Solution Approach 1:
The system segments the standard selection process by element, automatically identifying and selecting the most suitable standard sample for each specific element being analyzed. This element-wise segmentation allows different correction factors to be optimized for each element, improving overall quantification precision while the computer automation manages the complexity of multiple selections
Solution Approach 2:
The system uses stored spectral data from multiple standard samples with known compositions to calculate and compare correction factors for each element. By feedback loops that evaluate which standard sample provides the best match for each element's correction factors, the system automatically selects optimal standards, balancing automation extent with measurement precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the accuracy of element concentration quantification by selecting the optimal standard for each element, reducing errors and ensuring the sum of concentrations is within a threshold, thus enhancing the reliability of the quantification process.
Implementation Method 1
primary particles, e.g. electrons or X-ray photons, interact with a sample that is to be investigated and generate various secondary particles or signals, preferably X-ray photons, which are emitted by the sample in response to the incident primary particles
Implementation Method 2
The photons entering the detector can be analysed with respect to their energy or wavelength and summarized in the spectrum. These methods are referred as energy dispersive spectrometry (EDS) or wavelength dispersive spectrometry (WDS)
Data Source
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AI summary
The present invention discloses a method and device (10) for determining an element concentration of an EDS/WDS spectrum of an unknown sample. The method comprises performing a preliminary quantification (S100) of the EDS/WDS spectrum of the unknown sample and identify a plurality of elements in the unknown sample; identify (S200) at least one pre-stored standard sample including the plurality of elements; determine (S300), for each element of the plurality of elements, a similarity score for the corresponding element in each identified standard sample; select (S400), for each element of the plurality of elements, the one standard sample among the at least one standard sample by using the determined similarity score and identify the concentration of the corresponding element in the selected standard sample; and perform quantification (S500) of the EDS/WDS spectrum of the unknown sample by using, for each element of the plurality of elements, the identified concentration of the respectively selected standard sample.