EELS Spectrometer Auto-Alignment Using Simulated Spectrum Fitting

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Solution Overview

Problem

Current EELS systems face challenges in tuning optics for maximal resolution due to manual adjustment requirements and user expertise, leading to lengthy setup times and limited accessibility across laboratories, with existing automation techniques being inadequate for accurately correcting aberrations in EELS spectrometers.

Innovation Solution

An automated method for tuning EELS spectrometers involves generating a simulated EELS spectrum to fit an initial measurement, estimating aberration parameters, and adjusting optical elements to correct for aberrations, reducing the need for manual intervention and expertise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual adjustment of optical elements is used to correct aberrations, then tuning precision can be achieved, but system setup time increases significantly and requires expert user knowledge

Engineering Contradiction:
Improveaberration correction precisionVSAvoidsystem setup time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system performs self-tuning by automatically measuring aberrations using the EELS spectrum and adjusting optical elements without human intervention. The computer executes algorithms that analyze spectral peak shapes and control optical component positions, enabling the system to correct its own aberrations independently.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

Manual mechanical adjustment of optical elements is replaced by an automated computer-controlled system. The computer calculates optimal positions based on spectral analysis and electronically controls the optical elements, substituting human mechanical manipulation with automated computational control.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If manual tuning by experts is performed, then accurate aberration correction is achieved, but accessibility to EELS systems is limited

Engineering Contradiction:
Improveaberration correction accuracyVSAvoidsystem accessibility
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The system eliminates the need for expert operators by performing self-diagnosis and self-correction of optical aberrations. Any user can operate the system as the computer automatically analyzes the EELS spectrum and adjusts optical elements to optimal settings without requiring specialized knowledge.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

Expert manual tuning is replaced by automated computer analysis and control. The system uses algorithms to interpret spectral data and control optical components, substituting expert human judgment with computational automation that is accessible to all users.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Extent of automation

If existing automation techniques are used, then some level of automation is achieved, but accurate quantification of aberrations remains difficult

Engineering Contradiction:
Improvetuning automation levelVSAvoidaberration quantification accuracy
Core Design Contradiction:
Extent of automationVSMeasurement precision

Solution Approach 1:

The system uses feedback from the EELS spectrum itself to measure aberrations. By analyzing the shapes and positions of spectral peaks and comparing them to expected patterns, the system continuously monitors aberration levels and adjusts optical elements to maintain optimal performance.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The EELS spectrum serves multiple functions: it is both the analytical signal for sample investigation and the measurement signal for aberration detection. This multi-functionality enables the system to simultaneously perform spectroscopy and optical alignment without requiring separate diagnostic tools.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS12505996B2EELS auto-alignment using full image simulation
Publication Date: 2025.12.23 FEI CO
  • US12505996B2 patent drawing
  • US12505996B2 patent drawing
  • US12505996B2 patent drawing

AI summary

Methods and systems for automatically tuning an EELS spectrometer according to the present disclosure include obtaining an initial measurement of an EELS spectrum, generating an simulated EELS spectrum fit to the initial measurement of the EELS spectrum, and estimating one or more values of one or more aberration parameters based on the simulated EELS spectrum. Then, using the value(s) of the aberration parameter(s) to tune the optical elements of the EELS spectrometer to remove and/or reduce aberrations in the EELS system.