EELS Spectrum Acquisition via Sensor Segmentation and Beam Blanking

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Solution Overview

Problem

The existing Electron Energy Loss Spectrometry (EELS) systems in transmission electron microscopes face limitations in duty cycle and spectrum acquisition rate due to the time-consuming read-out process of image sensors, which leads to reduced exposure time and increased sample damage, and existing methods to enhance this often degrade signal quality or increase system complexity.

Innovation Solution

The solution involves shifting the electron energy loss spectrum across the imaging sensor in a way that exposure occurs simultaneously with read-out of different portions of the sensor, ensuring that the exposed region is never the same as the read-out region, thereby maximizing the duty cycle and minimizing exposure during read-out times.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the sensor readout process is performed sequentially row by row, then the readout mechanism is simple and reliable, but the duty cycle is limited to approximately 50% and spectrum acquisition rate is significantly reduced

Engineering Contradiction:
Improvespectrum acquisition rateVSAvoidreadout time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The sensor is divided into two distinct regions: a first portion dedicated to exposure and a second portion dedicated to readout. This segmentation allows simultaneous operation of both functions, with the electron spectrum exposed on the first portion while the second portion is being read out, thereby eliminating the sequential bottleneck and achieving near 100% duty cycle.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The exposure process continues uninterrupted by implementing parallel readout of a separate sensor portion. While the first portion accumulates electron spectrum data, the second portion is continuously read out and reset, ensuring that the sensor is always in a productive state without idle readout periods that previously reduced the duty cycle.

Inventive Principle:
Principle #20Continuity of useful action

2Measurement precision

If the exposure time is extended to improve spectrum quality, then signal-to-noise ratio improves, but sample damage increases due to prolonged electron beam exposure

Engineering Contradiction:
Improvesignal qualityVSAvoidsample damage
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

By implementing continuous parallel operation where exposure and readout occur simultaneously in different sensor regions, the system achieves high spectrum acquisition rates without extending individual exposure times. This allows rapid sequential sampling that accumulates high-quality data over time while minimizing cumulative sample damage.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The electron beam is blanked (turned off) during the readout period of the second sensor portion, creating an inert or non-exposing environment. This ensures that no electron dose is accumulated during readout operations, allowing the system to maintain high duty cycle without increasing sample damage.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

3Productivity

If the sensor is exposed continuously without interruption, then duty cycle approaches 100%, but readout operations cannot be performed and data is lost

Engineering Contradiction:
Improveduty cycleVSAvoiddata loss during readout
Core Design Contradiction:
ProductivityVSLoss of information

Solution Approach 1:

The sensor is divided into two distinct portions: the first portion continuously exposed to the electron spectrum while the second portion is continuously read out and reset. This spatial segmentation of functions allows the system to achieve near 100% duty cycle without data loss, as readout operations on the second portion do not interrupt exposure on the first portion.

Inventive Principle:
Principle #1Segmentation

4Productivity

If high speed readout is implemented to increase spectrum acquisition rate, then productivity improves, but signal quality degrades due to reduced exposure time

Engineering Contradiction:
Improvespectrum acquisition rateVSAvoidsignal quality
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

By dividing the sensor into separate exposure and readout portions, the system can perform high-speed readout of the second portion without reducing the exposure time of the first portion. Each portion operates independently at optimal speeds, allowing high spectrum acquisition rates while maintaining high signal quality through adequate exposure durations.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly increases the duty cycle to near 100% at high spectrum acquisition rates, allowing for faster and more efficient spectrum acquisition without degrading signal quality, and enables the system to maintain high purity of spectra by blanking the electron beam during shifts, preventing exposure during sensor read-out.

Implementation Method 1

an EELS deflector to deflect an electron beam

Methodology Applied
Scientific EffectElectron beam deflection: Lorentz Force

Implementation Method 2

a beam blanker to blank the electron beam during shifts

Methodology Applied
Scientific EffectBeam blanking: Electromagnet

Data Source

PatentUS11024484B2Method for high speed EELS spectrum acquisition
Publication Date: 2021.06.01 GATAN INC
  • US11024484B2 patent drawing
  • US11024484B2 patent drawing
  • US11024484B2 patent drawing

AI summary

A system and method are disclosed for acquiring Electron Energy Loss Spectrometry (EELS) spectra in a transmission electron microscope. The inventive system and method maximize spectrum acquisition rate and duty cycle by exposing a first portion of an image sensor to a first spectrum while a previously exposed potion of the sensor is read out of the sensor during some or all of the exposure time.