EL Display Sealing Layer Mask Design
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Solution Overview
Problem
Current methods for manufacturing large-size organic EL light-emitting elements face challenges in cost reduction and efficiency, particularly in forming discrete organic EL parts for color displays, as they require multiple fine-metal masks and vapor deposition processes, which are costly and inefficient for large-scale production.
Innovation Solution
The method involves forming a sealing layer on an EL display device using a mask with a contact part and an edge part, disposed over the substrate with a gap, to cover the panel part, which includes a thin-film transistor array and light emitting layers, employing plasma CVD equipment for silicon nitride film formation to enhance the manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple fine-metal masks and vapor deposition processes are used to form discrete organic EL parts for color displays, then manufacturing precision is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines multiple discrete organic EL part formation processes into a single integrated process. Specifically, it forms red, green, and blue organic EL light-emitting parts simultaneously in one manufacturing step using a single mask structure, rather than requiring separate vapor deposition processes for each color. This merging of operations reduces device complexity while maintaining the precision needed for color display formation.
Solution Approach 2:
The mask structure is designed with multi-functionality to serve multiple purposes: it defines the patterns for red, green, and blue organic EL parts simultaneously, acts as a support structure during the formation process, and enables single-step fabrication. This universal mask design eliminates the need for multiple specialized masks, reducing both device complexity and manufacturing cost while preserving manufacturing precision.
2Manufacturing precision
If multiple fine-metal masks and vapor deposition processes are used to form discrete organic EL parts, then manufacturing precision is improved, but productivity decreases
Solution Approach 1:
The patent merges multiple sequential fabrication steps into a single parallel process. By forming all three color organic EL light-emitting parts (red, green, and blue) simultaneously in one vapor deposition step using a unified mask structure, the manufacturing cycle time is dramatically reduced. This increases productivity while the mask design ensures that manufacturing precision requirements are met for all color regions.
3Manufacturing precision
If conventional masking methods are used with mask close to substrate, then manufacturing precision is improved, but the risk of mask damage and contamination increases
Solution Approach 1:
The patent introduces a vertical dimension to the mask-substrate relationship by positioning the mask at a specific distance above the substrate rather than in direct contact. This spatial separation in the vertical dimension allows the formation of organic EL parts through vapor deposition while preventing mechanical contact that could damage the mask or contaminate the substrate. The mask structure is designed with appropriate height and support to maintain this optimal distance, ensuring both manufacturing precision and mask reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach increases yield and reduces costs by allowing for the use of large-size substrates and efficient film formation, improving the manufacturing efficiency of EL display devices while maintaining high definition and reliability.
Implementation Method 1
employing plasma CVD equipment for silicon nitride film formation
Data Source
AI summary
A method of manufacturing an EL display device having a panel part that comprises a light emitting part in which a plurality of pixels are arrayed, and a thin-film transistor array device to control light emission of the light emitting part. The method includes the following steps: forming the panel part on a substrate, and then forming a sealing layer to cover the panel part. The step of forming the sealing layer is performed by forming a film configuring the sealing layer, with the mask being disposed over base substrate. Mask includes contact part in contact with the base substrate, and edge part disposed over the panel part with a gap between the edge part and the panel part.


