Elastic Light Module Mounting for FTIR Sensitivity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing light modules face limitations in improving the sensitivity of Fourier Transform Infrared (FTIR) systems due to the size constraints of movable mirrors on silicon-on-insulator (SOI) substrates, and the bonding process can adversely affect the driving of optical elements, especially when the characteristics of the mounting region are not favorable.
Innovation Solution
A light module design featuring an optical element with an optical surface, an elastic portion forming an annular region, and support portions that can change distance due to elastic deformation, mounted on a base with a communicating opening, allowing reliable attachment through elastic forces without relying on bonding agents, regardless of the mounting region's characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the size of movable mirror is increased to improve FTIR sensitivity, then sensitivity is improved, but the degree of completion of deep cutting with respect to SOI substrate becomes insufficient
Solution Approach 1:
The movable mirror is separated from the SOI substrate structure and mounted as a separate component in a movable mounting region. This segmentation allows the mirror size to be increased independently of the SOI substrate cutting depth limitations, while the mounting structure handles the mechanical integration.
Solution Approach 2:
A movable mounting region with bond pad acts as an intermediary between the SOI substrate and the separately formed movable mirror. This intermediary structure enables the mounting of large-sized mirrors that cannot be directly integrated into the SOI substrate through deep cutting.
2Reliability
If bonding process is used to mount optical element, then mounting is achieved, but driving of mounting region is adversely affected
Solution Approach 1:
The bond pad is designed with specific local properties (material composition, thickness, bonding characteristics) that enable reliable bonding of the optical element while maintaining mechanical flexibility. The local quality of the bond pad allows it to bond firmly yet permit the mounting region to deform during actuation.
Solution Approach 2:
The mounting structure is designed to be dynamic rather than rigid. The bond pad and surrounding mounting region can deform elastically during actuation, allowing the system to adapt to driving forces while maintaining the optical element's position. This dynamic design prevents bonding from adversely affecting the driving operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables reliable and flexible mounting of optical elements, enhancing the sensitivity of FTIR systems by decoupling the optical element's attachment from the specific characteristics of the mounting region, thus overcoming size limitations and potential bonding-related issues.
Implementation Method 1
an elastic portion which is provided around the optical portion such that an annular region is formed, and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion
Data Source
AI summary
A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.