Elastic Member Deformation Detection via Carbon Nanotube Resin
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Solution Overview
Problem
It is challenging to detect deformation of elastic members used for airtightness in devices such as substrate processing apparatuses, as external forces applied to these members must be perpendicular and uniform to function correctly, and incorrect application can lead to leakage or damage, making it difficult to observe or detect deformation, especially when the members are not transparent.
Innovation Solution
A detection device comprising an elastic member disposed between bonded members, a measuring part to measure electrical characteristics at multiple locations, and a detecting part to detect deformation based on these measurements, utilizing conductive resin with carbon nanotubes to enhance sensitivity, allowing for the detection of normal or abnormal deformation and ensuring proper bonding and sealing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If elastic members are used for airtightness bonding, then sealing reliability is improved, but deformation detection becomes difficult
Solution Approach 1:
The patent embeds carbon nanotubes in the elastic member to create optical absorption characteristics. When the elastic member deforms, the optical absorption changes, allowing visual detection of deformation state. This transforms an invisible mechanical deformation into an observable optical change, resolving the detection difficulty while maintaining sealing reliability.
Solution Approach 2:
The patent introduces carbon nanotubes as an intermediary substance within the elastic member. These nanotubes act as a mediator that translates mechanical deformation into measurable electrical resistance changes or optical absorption changes, enabling indirect detection of deformation without compromising the elastic member's sealing function.
2Reliability
If external force is applied to elastic member, then sealing function is activated, but uniform deformation is difficult to achieve
Solution Approach 1:
The patent employs sensors to detect the deformation state of the elastic member in real-time and provides feedback to the control system. This feedback mechanism allows the system to adjust the applied force to achieve uniform deformation, ensuring the elastic member activates its sealing function correctly without localized stress concentrations that could cause failure.
Solution Approach 2:
The patent replaces direct mechanical observation of deformation with electrical or optical measurement systems. By using resistance changes or optical absorption changes as proxies for mechanical deformation, the system can precisely measure and control deformation uniformity without relying on visual inspection or complex mechanical gauges.
3Measurement precision
If carbon nanotubes are embedded in resin, then strain detection sensitivity is improved, but material complexity increases
Solution Approach 1:
The patent creates a composite material by embedding carbon nanotubes within the elastic member's resin matrix. This composite structure combines the elastic properties of the resin with the electrical and optical properties of carbon nanotubes, enabling strain detection functionality while maintaining the material's mechanical flexibility and sealing capabilities.
Solution Approach 2:
The patent exploits changes in electrical resistance and optical absorption parameters of carbon nanotubes in response to strain. By monitoring these parameter changes, the system achieves high strain detection sensitivity. The carbon nanotubes' inherent properties are leveraged to convert mechanical deformation into measurable electrical or optical signal variations without adding complex external sensing systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the detection of elastic member deformation, preventing leakage and damage by ensuring uniform deformation and proper bonding, thus maintaining airtightness and preventing abnormal holding or chamber bonding issues.
Implementation Method 1
The measuring part is configured to measure electrical characteristics at multiple locations of the elastic member
Implementation Method 2
utilizing conductive resin with carbon nanotubes to enhance sensitivity
Implementation Method 3
The elastic member is disposed between a first member and a second member at a bonding portion where the first member and the second member are bonded and the elastic member is configured to be elastically deformable
Data Source
AI summary
A detection device according to one embodiment of the present disclosure includes an elastic member, a measuring part and a detection part. The elastic member is disposed between a first member and a second member at a bonding portion where the first member and the second member are bonded and the elastic member is configured to be elastically deformable. The measuring part is configured to measure electrical characteristics at multiple locations of the elastic member. The detecting part is configured to detect deformation of the elastic member based on the electrical characteristics measured at the multiple locations by the measuring part.