Elastic Membrane Break-In Processing for Polishing Apparatus Utilization

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Solution Overview

Problem

Conventional break-in processes for elastic membranes in polishing apparatuses reduce the utilization rate of the apparatus due to the need for offline operations and subsequent verification, leading to inefficiencies.

Innovation Solution

A break-in processing apparatus and method that includes a stage, fluid supply unit, and break-in determination module to assess the completion of the break-in process for elastic membranes, allowing for reliable determination of membrane elasticity without requiring offline operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the break-in process is performed with the new elastic membrane attached to the substrate holding apparatus of the polishing apparatus, then the elasticity of the elastic membrane can be enhanced, but the polishing apparatus cannot be operated during the break-in process, resulting in a lower utilization rate

Engineering Contradiction:

Improveelasticity of elastic membraneVSAvoidutilization rate of polishing apparatus

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The break-in process is extracted from the polishing apparatus and performed on a separate dedicated stage. The elastic membrane assembly is removed from the substrate holding apparatus and placed on the break-in stage, allowing the polishing apparatus to continue operating independently while the break-in process occurs in parallel on separate equipment.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The break-in process is performed as a preliminary operation before the elastic membrane assembly is installed into the substrate holding apparatus. By completing the break-in process in advance on a dedicated stage, the membrane is pre-conditioned before being integrated into the polishing system, eliminating the need to停机 the polishing apparatus during break-in.

Inventive Principle:

Principle #10Preliminary action

2Productivity

If the break-in process is performed offline without automated determination, then the apparatus can be operated, but it is difficult to confirm whether the break-in process has been properly performed, requiring repeated break-in processes and further reducing utilization

Engineering Contradiction:

Improveutilization rate of polishing apparatusVSAvoidconfirmation of break-in completion

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

A load measuring device provides real-time feedback on the load applied by the elastic membrane during the break-in process. The measurement value is displayed to indicate the state of the break-in process, and when the load reaches a predetermined value, the break-in process is automatically determined to be complete. This feedback mechanism eliminates guesswork and allows for precise determination of break-in completion.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The manual assessment of break-in completion is replaced with an automated measurement system. Instead of relying on operator judgment or subsequent polishing profile analysis, a load measuring device objectively measures the mechanical load of the elastic membrane, substituting mechanical measurement for subjective evaluation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables reliable completion of the break-in process before installation, preventing reductions in polishing apparatus utilization and ensuring consistent polishing performance.

Implementation Method 1

a fluid supply unit configured to supply a pressurized fluid having a predetermined pressure into a pressure chamber formed between the outermost periphery portion of the elastic membrane and the carrier

Methodology Applied

Scientific EffectFluid pressure: Pressure Increase

Implementation Method 2

the controller determines a completion of a break-in process of the elastic membrane based on a load applied to the break-in determination module by the elastic membrane which is expanded by the pressurized fluid

Methodology Applied

Scientific EffectElasticity: Elasticity

Data Source

PatentUS20250289088A1Break-in processing apparatus and break-in processing method

Publication Date: 2025.09.18 EBARA CORP

AI summary

A break-in processing apparatus is disclosed, which can reliably perform a break-in process for an elastic membrane without reducing a utilization rate of a polishing apparatus. The break-in processing apparatus includes a stage to which an elastic membrane assembly including a carrier and an elastic membrane attached to the carrier is placed; a break-in determination module facing the elastic membrane placed to the stage; a fluid supply unit configured to supply a pressurized fluid into a pressure chamber formed between the outermost periphery portion of the elastic membrane and the carrier; and a controller configured to control operations of the break-in determination module and the fluid supply unit. The controller determines a completion of a break-in process of the elastic membrane based on a load applied to the break-in determination module by the elastic membrane which is expanded by the pressurized fluid supplied into the pressure chamber.