End Effector With Elastic Pads for Substrate Sticking Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing backside contact type end effectors in substrate processing systems suffer from substrate sticking, wearing out, and misalignment due to contact imbalance, leading to reduced lifetime and instability during substrate handling.
Innovation Solution
The end effector design incorporates a paddle with a blade part and multiple pads, each equipped with an elastic absorbing unit, such as an O-ring, to stabilize and correct substrate alignment, reducing shock and improving contact stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of moving object
If a backside contact type end effector is used for substrate handling, then substrate transport is enabled, but substrate sticking and pad wearing out occur reducing lifetime
Solution Approach 1:
The end effector employs multiple pads (at least three) distributed at different locations on the substrate backside, with each pad independently contacting the substrate at specific points. This local contact approach prevents concentrated stress and sticking while distributing wear across multiple pad-substrate contact points, extending pad lifetime while maintaining reliable substrate handling
Solution Approach 2:
The robot arm with multiple degrees of freedom dynamically adjusts the end effector's position and orientation to achieve proper substrate contact. The system uses real-time feedback from sensors to maintain optimal contact force and alignment, preventing substrate sticking while ensuring stable transport throughout the substrate processing cycle
2Productivity
If a robot arm is used to handle substrates, then automated transport is achieved, but substrate bouncing and misalignment occur due to contact imbalance
Solution Approach 1:
Multiple pads are strategically positioned at different locations on the substrate backside to create balanced contact points. This distributed contact configuration prevents substrate bouncing and misalignment by ensuring uniform force distribution across the substrate, maintaining high positioning precision during automated transport
Solution Approach 2:
Sensors detect substrate position and contact status in real-time, providing feedback to the robot control system. The system dynamically adjusts robot arm movements and end effector positioning based on this feedback, correcting any misalignment or bouncing tendencies to maintain precise substrate placement throughout the handling process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances substrate stability and reduces wear by absorbing shocks and correcting tilting, thereby extending the end effector's lifespan and ensuring precise substrate handling.
Implementation Method 1
an absorbing unit configured to encircle a lower side of the supporting unit and fitted into a hole, wherein the absorbing unit is elastic and flexible to be able to absorb shocks
Implementation Method 2
the absorbing unit is elastic and flexible to be able to absorb shocks and seal the supporting unit and the hole
Data Source
AI summary
An end effector used for transporting a substrate in a substrate processing system is presented. The end effector comprises a paddle configured to support a substrate and the paddle being flat; a blade part connected to the paddle at a first end of the paddle, wherein a distal end of the blade part is provided with a front protrusion for positioning a substrate; and a plurality of pads disposed in each of a plurality of holes, wherein the plurality of pads contact the substrate when transporting the substrate and wherein the plurality of holes are disposed in the paddle and the blade part. The end effectors may allow tilting of the pads so that substrates would not stick.