Elastic Wave Electrode Layout to Prevent Passband Ripple

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Solution Overview

Problem

Elastic wave devices suffer from ripple generation in the pass band due to electric charge stagnation and surge breakdown during the formation of IDT electrodes, leading to variability in ripple frequencies and magnitudes.

Innovation Solution

The elastic wave device design includes a piezoelectric film directly or indirectly laminated on a high acoustic velocity member, with a close contact layer improving adhesiveness, and conductive films used to define IDT electrodes and connection wiring, reducing the area of the first conductive film and minimizing surge breakdown and ripple generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If a low acoustic velocity film formed with insulation material is provided under the piezoelectric film, then electric charge stagnation is reduced, but surge breakdown occurs between IDT electrode components

Engineering Contradiction:
Improveelectric charge stagnationVSAvoidsurge breakdown
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

A close contact layer is introduced as an intermediary between the piezoelectric film and the low acoustic velocity film. This close contact layer serves as a mediator that prevents both electric charge stagnation and surge breakdown by providing a controlled interface that manages electrical field distribution while maintaining acoustic wave propagation characteristics.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention modifies the structural parameters of the film stack by introducing the close contact layer with specific material properties and thickness. This parameter change alters the electrical field distribution and charge accumulation characteristics, preventing surge breakdown while maintaining the low acoustic velocity film's ability to reduce charge stagnation.

Inventive Principle:
Principle #35Parameter changes

2Volume of moving object

If the thickness of the piezoelectric film is small, then device size is reduced, but electric charge stagnation increases causing surge breakdown

Engineering Contradiction:
Improvepiezoelectric film thicknessVSAvoidelectric charge stagnation
Core Design Contradiction:
Volume of moving objectVSObject-generated harmful factors

Solution Approach 1:

The invention creates a composite structure consisting of the piezoelectric film, close contact layer, and low acoustic velocity film. This composite material system allows the thin piezoelectric film to maintain small device size while the combined structure prevents charge stagnation through the specialized properties of the close contact layer and low acoustic velocity film.

Inventive Principle:
Principle #40Composite materials

3Ease of manufacture

If connection wiring is defined by the first conductive film, then manufacturing process is simplified, but surge breakdown occurs and ripples are generated in pass band

Engineering Contradiction:
Improveconductive film processVSAvoidripple generation
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The conductive films are segmented into different functional layers: the first conductive film defines the IDT electrodes while the second conductive film defines the connection wiring. This segmentation allows each conductive film to be optimized for its specific function, preventing surge breakdown and ripple generation while maintaining manufacturing simplicity through sequential formation processes.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively prevents ripple generation in the pass band, enhances adhesiveness, and reduces the risk of surge breakdown, leading to improved frequency characteristics and increased Q-value.

Implementation Method 1

a piezoelectric film, a first conductive film provided on the piezoelectric film, and a second conductive film provided on the piezoelectric film and on at least a portion of the first conductive film

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a high acoustic velocity member in which an acoustic velocity of a bulk wave propagating in the high acoustic velocity member is larger than an acoustic velocity of a main mode elastic wave propagating in the piezoelectric film

Methodology Applied
Scientific EffectAcoustic wave propagation: Speed of Sound

Data Source

PatentUS10256793B2Elastic wave detection
Publication Date: 2019.04.09 MURATA MFG CO LTD
  • US10256793B2 patent drawing
  • US10256793B2 patent drawing
  • US10256793B2 patent drawing

AI summary

An elastic wave device includes a piezoelectric film and a high acoustic velocity member in which an acoustic velocity of a bulk wave propagating in the high acoustic velocity member is larger than an acoustic velocity of a main mode elastic wave propagating in the piezoelectric film, the piezoelectric film that is directly or indirectly laminated on the high acoustic velocity member, a first conductive film provided on the piezoelectric film, and a second conductive film that is provided on the piezoelectric film and on at least a portion of the first conductive film. A plurality of IDT electrodes including electrode fingers and busbars are provided on the piezoelectric film, at least electrode fingers of a plurality of IDT electrodes are defined by the first conductive film, and at least a portion of connection wiring with which the plurality of IDT electrodes are connected to each other is defined the second conductive film.