Laser-formed alteration inside the connection portion enables precise frequency tuning without residue, electrode scattering, or major strength loss.
Projecting insulating portions create a defined substrate gap to limit heat conduction and stabilize oscillator frequency.
Separating the main resonance from spurious modes helps this resonator maintain frequency accuracy, reduce internal resonance loss, and raise Q value.
Opposite-phase dual-sided IDTs on a LiNbO3 substrate excite high-order SH-dominant plate waves to raise acoustic velocity while preserving bandwidth.
Bottom-placed electrodes keep the piezoelectric surface accessible for trimming, loading, and added functional layers in MEMS guided wave devices.
A gain circuit tracks MEMS resonator quality factor changes from pressure shifts and adjusts output phase to correct zero-rate offset.
A slit in overlapping ground and signal wiring improves elastic wave filter isolation while maintaining low loss on the mounting substrate.
Different electrode finger cycles in a ladder-type SAW resonator sharpen low-band attenuation while improving process margin and throughput.
Bulk and surface micromachining enlarge transduction area and cut anchor loss, enabling low-voltage, high-Q MEMS resonators above CMOS.
An upper-electrode opening removes the BAW resonator hot spot, reducing self-heating, bowing, and passband instability at higher power.
A MEMS beam interleaves or sandwiches electrodes on a piezoelectric substrate to switch SAW and BAW filters for precise tuning.
Heavy n-type doping in a width-extensional silicon plate resonator cuts temperature-driven frequency drift and reduces active compensation needs.
Segmented conductive films and a close contact layer suppress charge stagnation, surge breakdown, and passband ripple in elastic wave filters.
By removing the piezoelectric thin film beneath the pad electrode, bonding pressure and thermal stress no longer cause breakage or peeling.
Removing nonfunctional piezoelectric substrate regions cuts thermal stress and charge buildup while maintaining acoustic wave element interconnections.
Bulk acoustic wave transducers fold the RF signal path to combine power, isolate input ports, and shrink combiner size for portable systems.
A peripheral mass adjustment structure reshapes resonance boundaries to improve Q factor, maintain film flatness, and resist collapse.
Negatively coupled inductors and shunt acoustic resonators widen bandstop filtering while preserving flat passbands and strong signal rejection.
Cut-corner excitation electrodes with a defined area ratio confine main vibration and suppress spurious coupling, improving quartz resonator accuracy and yield.
Strategic inductor coupling in a compact duplexer branching circuit boosts out-of-band attenuation and isolation between adjacent filters.
A permanent electret field shifts acoustic resonant frequency without high DC voltage or complex trimming, improving yield in mobile filters.
By shifting bulk-wave radiation cutoff above the passband, this LiTaO3 SAW filter cuts high-side insertion loss while keeping wide bandwidth.
Multiple IDT electrodes linked to filter nodes suppress higher-order modes and improve attenuation and isolation in compact RF filters.
Perimeter structures and varied electrode geometry help acoustic RF resonators support multiple standards without adding filter complexity.
Perimeter structures, electrode geometry, and ion implantation improve acoustic resonator filtering while limiting RF complexity across multiple standards.
A clearance in the crystal unit package vents heated air around the thermosensitive element, improving temperature reading accuracy.
Close thermal coupling between the semiconductor die and resonator cuts temperature mismatch, helping a TCXO hold frequency within ±150 ppb.
A shared bus bar and selective removal of dummy fingers shrink serial IDT acoustic wave filters while preserving power durability and wave confinement.
Multiple side contacts shorten BAW interconnects to cut acoustic leakage and parasitic effects, improving Q-factor and resonant frequency.
Tilted side surfaces let gyro vibrator electrodes be formed by plane exposure, simplifying manufacturing while stabilizing sensitivity.
Inclined air cavity sides with controlled film roughness prevent cracks and abnormal crystal growth, improving BAW filter insertion loss.
Perpendicular capacitive electrodes add electrostatic capacitance in a smaller SAW filter while suppressing unwanted waves and sharpening passband edges.
A tuned parallel resonator adds an attenuation pole above the passband, sharpening filter roll-off while lowering heat and power loss.
A parallel elastic wave filter with IDT spacing of 12λ or less broadens high-attenuation frequencies and improves duplexer signal isolation.
Laser-formed diffusing regions inside the BAW substrate scatter elastic waves, avoiding grinding and etching while preserving frequency characteristics.
A startup frequency sweep detects MEMS resonance before PLL lock, cutting inertial sensor lock time and avoiding individual trimming.