Gyro Vibrator Electrode Layout Using Tilted Side Surfaces
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Solution Overview
Problem
The existing manufacturing process for gyro sensors with piezoelectric materials, such as quartz crystal H-type gyro elements, faces challenges in using simple devices for electrode formation due to the perpendicular orientation of detection electrodes, making it difficult to perform exposure processes efficiently.
Innovation Solution
The design includes vibrating arms with tilted sections on their surfaces, allowing for the use of plane exposure methods to easily irradiate and separate electrodes, which are connected by side surface and groove electrodes, facilitating the formation of electrodes without the need for complex exposure devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If detection electrodes are disposed on side surfaces perpendicular to obverse and reverse surfaces, then electrode formation is simple using photolithography, but it becomes difficult to use simple manufacturing devices for irradiating surfaces with light in vertical direction
Solution Approach 1:
The invention changes the orientation of the tilted section from a vertical side surface to an inclined surface that exposes the electrode formation area toward the obverse surface direction. This dimensional reorientation allows plane exposure devices to irradiate light vertically onto the electrode pattern without requiring complex angled exposure equipment, thus resolving the contradiction between manufacturing simplicity and device complexity
2Ease of manufacture
If tilted section is exposed toward obverse surface in planar view, then plane exposure can easily irradiate the tilted section with parallel light, but requires specific geometric configuration of the vibrating arm
Solution Approach 1:
The invention applies local quality by creating a tilted section with specific geometric properties only in the region where electrode patterns need to be formed. The rest of the vibrating arm maintains its original structure and function. This localized geometric modification enables plane exposure while preserving the overall vibrating arm functionality, resolving the contradiction between exposure ease and shape constraints
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient electrode separation and formation, stabilizes detection sensitivity, reduces capacitive coupling, and allows for miniaturization while maintaining high vibration characteristics and cost-effectiveness.
Implementation Method 1
the gyro sensor detects an electric signal, which is generated in a part of a gyro vibrator element (a gyro vibrating element) due to a vibration such as a tremor or a rotation of an object
Data Source
AI summary
A vibrator element includes drive vibrating arms extending from an end of a base section, the drive vibrating arms are each provided with an obverse surface, a reverse surface disposed on an opposite side to the obverse surface, and a side surface connecting the obverse surface and the reverse surface to each other, a tilted section facing toward the obverse surface is disposed at least a part of the side surface, and there are disposed a first drive electrode and a second drive electrode obtained by bisection with an electrode separation section disposed in the tilted section.