Cross-linking Elastomer Composition for Plasma Seal Hardness Reduction
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Solution Overview
Problem
Molded articles, such as seal members, used in plasma treatment and semiconductor manufacturing apparatuses face challenges with high hardness and limited flexibility, which can lead to breakage during high-temperature treatments, and existing materials fail to balance plasma resistance with reduced hardness effectively.
Innovation Solution
A crosslinkable elastomer composition incorporating a hydrogen-free fluorine oligomer is used, which includes specific copolymers and perfluoroelastomers, to lower the hardness of molded articles while maintaining or improving plasma resistance, comprising vinylidene fluoride/hexafluoropropene-based copolymers, perfluoroelastomers, and silicone rubber, with the oligomer added in proportions that enhance both properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If perfluoroelastomers are used to achieve good plasma resistance and chemical resistance, then plasma resistance and chemical resistance are improved, but hot strength is reduced and risk of breakage during high-temperature treatments increases
Solution Approach 1:
The patent uses a composite material system combining perfluoroelastomer (A) with uncrosslinked elastomer (B) in a specific ratio (95:5 to 50:50 by weight). This composite approach allows the perfluoroelastomer to provide plasma and chemical resistance while the uncrosslinked elastomer compensates for hot strength deficiencies, resolving the contradiction between reliability in plasma environments and strength at high temperatures.
2Reliability
If crosslinked perfluoroelastomer composition is used to achieve excellent plasma resistance and chemical resistance, then plasma resistance and chemical resistance are improved, but hardness is increased and flexibility is reduced
Solution Approach 1:
The patent modifies the compositional parameters by incorporating uncrosslinked elastomer (B) in specific proportions (5-50 parts by weight per 100 parts of perfluoroelastomer). This parameter change allows the material to maintain plasma resistance from the perfluoroelastomer while the uncrosslinked elastomer reduces hardness and improves flexibility, resolving the contradiction between reliability and ease of operation.
3Quantity of substance
If vinylidene fluoride/hexafluoropropene-based copolymers are used to reduce cost, then cost is reduced, but plasma resistance performance is compromised
Solution Approach 1:
The patent creates a composite system where vinylidene fluoride/hexafluoropropene-based copolymers (elastomer B) are combined with perfluoroelastomer (A). The copolymer provides cost advantage while the perfluoroelastomer component maintains plasma resistance. The synergistic composite structure allows cost reduction through the use of less expensive copolymer while preserving essential plasma resistance properties through the perfluoroelastomer phase.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The approach effectively reduces the hardness of molded articles and enhances their plasma resistance, making them suitable for harsh environments without compromising mechanical strength, and allows for cost reduction by replacing expensive perfluoroelastomers with less costly fluorine oligomers.
Implementation Method 1
a crosslinkable elastomer composition, a molded article, a seal member, a plasma treatment apparatus and a semiconductor manufacturing apparatus that include said seal member, and use of a hydrogen-free fluorine oligomer for reducing the hardness and improving a plasma resistance performance of a molded article
Implementation Method 2
Perfluoroelastomers demonstrate especially good plasma resistance and chemical resistance
Data Source
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AI summary
The present invention addresses the problem of reducing the hardness of a molded article obtained by cross-linking a cross-linking elastomer. The problem addressed by the present invention is solved by cross-linking a cross-linking elastomer composition including at least a cross-linking elastomer and a fluorine oligomer (a) not including hydrogen.