Electric-Controlled Operator Gripper Mechanism for Semiconductor Handling
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Solution Overview
Problem
Existing electric-controlled operators for semiconductor processing require frequent base rotation and motor operation, leading to wear and reduced service life, as they need to alternate between two groups of grippers for putting in and taking out objects from different surfaces, causing frequent part replacements.
Innovation Solution
An electric-controlled operator design where both groups of grippers are controlled individually to grip and release objects from the same surface side of the base, eliminating the need for base rotation, using a solenoid valve and gripper arm position sensors to manage gripper positions, and incorporating elastic members for reciprocating motion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the base rotates 180° frequently to alternate between first group of grippers and second group of grippers, then contamination between objects before processing and after processing is prevented, but wear on the base and motor increases and service life is reduced
Solution Approach 1:
The system is divided into two independent groups of grippers (first group and second group) that can operate independently without requiring base rotation. Each group is controlled separately, allowing one group to grip while the other releases, eliminating mechanical wear from rotation while maintaining contamination prevention.
Solution Approach 2:
Both groups of grippers are configured to grip objects from the same surface side of the base, making them universally capable of performing both putting-in and taking-out operations. This eliminates the need for base rotation to switch between different gripping surfaces, reducing wear while maintaining functional separation for contamination control.
2Reliability
If the base rotates frequently to switch between first group of grippers and second group of grippers, then objects before processing and after processing can be handled by different gripper groups, but operational efficiency is reduced due to frequent motor operation
Solution Approach 1:
The gripper system is segmented into two independently controllable groups that can operate simultaneously without coordination through base rotation. This allows parallel operation where one group grips while the other releases, eliminating time-consuming rotation steps and improving operational efficiency while maintaining contamination prevention.
Solution Approach 2:
The independent control of both gripper groups enables continuous operation without interruption for base rotation. While one group is gripping, the other can be releasing or positioning, ensuring continuous useful action and improving productivity while maintaining the functional separation needed for contamination control.
3Duration of action of stationary object
If individual control of first group of grippers and second group of grippers is implemented, then base rotation is eliminated and service life is extended, but control system complexity increases
Solution Approach 1:
The mechanical base rotation system is replaced with an independent control system for each gripper group. Instead of using mechanical rotation to switch between gripper groups, the patent uses independent actuation (pneumatic or electric) of each group, eliminating mechanical wear while the control complexity is managed through standardized control interfaces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces wear on parts, mitigates the need for frequent replacements, and enhances operational efficiency by allowing both groups to operate from the same surface side, preventing contamination and extending the service life of components.
Implementation Method 1
Each one of the first group of grippers and said second group of grippers can be coupled to the base via a corresponding cylinder and can include a gripper arm connected to the cylinder
Implementation Method 2
an elastic member can be connected between each gripper arm and the base
Data Source
AI summary
An electric-controlled operator includes, in part, a first group of grippers and a second group of grippers which are coupled to a base. Grippers in the first group of grippers are adapted to cooperatively grip an object and cooperatively release the object. Grippers in the second group of grippers are adapted to cooperatively grip an object and cooperatively release the object. When the first (or the second) group of grippers cooperatively grips an object, the second (or the first) group of grippers is in a state in which the object is released. The first and second groups of grippers are adapted to put in and take out objects from the same surface of the base thus eliminating the need for turning of the base during the operation.