Electro-optical Device Groove Segmentation for Capacitance
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In electro-optical devices, intersecting grooves used to increase capacitance often result in recesses that are difficult to fill, leading to incomplete formation of capacitance elements and potential stress or cracking issues during insulating film formation.
Innovation Solution
The electro-optical device incorporates a substrate with a first groove and a second groove extending in intersecting directions, but positioned away from each other, with a layered film structure including conductive films and a dielectric film, covered by an insulating film, which enhances capacitance while allowing easier filling of recesses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the first groove and the second groove are extended to intersect each other to increase capacitance, then the capacitance of the capacitance element is increased, but the opening width at the intersection increases during etching, making recesses less likely to be filled
Solution Approach 1:
The patent divides the groove structure into separate first and second grooves that do not intersect, segmenting the capacitance-enhancing features to avoid the opening width expansion problem that occurs at intersections
2Quantity of substance
If the first groove and the second groove are extended to intersect each other to increase capacitance, then the capacitance of the capacitance element is increased, but stress and cracking issues occur during insulating film formation
Solution Approach 1:
By segmenting the groove structure into non-intersecting first and second grooves, the patent eliminates the stress concentration points that would form at intersections, preventing cracking during insulating film formation
3Quantity of substance
If the first groove and the second groove are extended to intersect each other to increase capacitance, then the capacitance of the capacitance element is increased, but the film formation time is extended
Solution Approach 1:
The segmented non-intersecting groove structure allows for more uniform film deposition compared to intersecting grooves, reducing the time required to achieve complete filling and uniform insulating film formation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration increases capacitance while ensuring stable and complete filling of recesses, reducing the risk of stress and cracking, and shortening the film formation time for the insulating layer.
Implementation Method 1
a structure has been proposed in which a groove is provided in a region overlapping the capacitance element in plan view, and in which the capacitance of the capacitance element is increased utilizing the sidewalls of the groove
Data Source
AI summary
In a substrate body of an electro-optical device, a first groove, and a second groove extending in a direction intersecting the first groove are formed. A capacitance element is constituted by a layered film that includes a first conductive film, a dielectric film, and a second conductive film sequentially layered in a region including the first groove and the second groove. When the first groove and the second groove intersect, the intersection becomes wide during etching. However, when the first groove and the second groove do not intersect, such as when the first groove and the second groove are spaced apart, a wide portion is less likely to be generated. Accordingly, the first insulating film easily fills the grooves.