Electrode Carrier Assemblies with Micro-Mesa Radial Positioning
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Solution Overview
Problem
Existing electrode carriers for plasma processing systems fail to effectively limit radial movement and secure multi-component electrodes, leading to potential misalignment and contamination during handling and processing.
Innovation Solution
The electrode carrier assembly features an electrode carrying annulus with radial sidewall projections and micro-mesas, along with rotatable electrode mounting members and hand-operated screws, which collectively limit radial movement and provide adjustable clamping to secure electrodes, preventing misalignment and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing electrode carriers are used, then electrode handling is simple, but radial movement of electrodes is not effectively limited leading to misalignment and contamination
Solution Approach 1:
The carrier structure is segmented into multiple functional components: the annulus body, radial sidewall projections with upward-facing micro-mesas for radial positioning, and rotatable electrode mounting members with downward-facing micro-mesas for axial positioning. This segmentation allows each component to perform its specific function independently, achieving reliable electrode positioning without excessive overall complexity.
Solution Approach 2:
Micro-mesas act as intermediary elements between the carrier components and the electrode. The upward-facing micro-mesas on radial sidewall projections provide radial positioning, while downward-facing micro-mesas on mounting members provide axial positioning. These intermediary micro-mesa structures enable precise electrode positioning without requiring complex direct coupling mechanisms.
2Reliability
If fixed clamping structures are used, then electrode security is improved, but adaptability to electrodes of varying thicknesses is reduced
Solution Approach 1:
The electrode mounting members are designed to be rotatable rather than fixed, allowing dynamic adjustment between a free position and a bracketed position. This dynamic capability enables the mounting members to accommodate electrodes of varying thicknesses while maintaining secure clamping when needed, resolving the contradiction between security and adaptability.
Solution Approach 2:
The clamping parameters are made adjustable through rotation of the mounting members. By changing the angular position of the mounting members, the clamping force and position can be adjusted to match different electrode thicknesses, maintaining reliable securing across varying electrode dimensions.
3Adaptability or versatility
If complex adjustment mechanisms are used, then adaptability to varying electrode thicknesses is improved, but ease of operation is reduced
Solution Approach 1:
The rotatable mounting members provide simple rotational motion for adjustment, eliminating the need for complex multi-step adjustment mechanisms. The rotation between free and bracketed positions intuitively adjusts the clamping parameters to match electrode thicknesses, maintaining ease of operation while achieving adaptability.
Solution Approach 2:
The mounting members are designed to self-adjust through rotation, with the geometry of the components themselves providing the adjustment mechanism. The upward-facing and downward-facing micro-mesas work together to automatically position the electrode correctly when the mounting member is rotated, reducing the operational complexity.
4Manufacturing precision
If micro-mesas with different spacing are used, then precision of electrode positioning is improved, but manufacturing complexity increases
Solution Approach 1:
The positioning function is segmented into two independent micro-mesa systems: upward-facing micro-mesas on radial sidewall projections for radial positioning, and downward-facing micro-mesas on mounting members for axial positioning. This segmentation allows each micro-mesa set to be optimized for its specific direction with appropriate spacing, achieving precise three-dimensional positioning while keeping each manufacturing sub-task relatively simple.
Solution Approach 2:
The micro-mesas serve as intermediary positioning elements with optimized spacing in their respective directions. The upward-facing and downward-facing micro-mesas act as mediators between the carrier structure and electrode, providing precise positioning control without requiring complex integrated positioning features that would increase manufacturing difficulty.
Data Source
AI summary
In accordance with one embodiment of the present disclosure, an electrode carrier assembly is provided including an electrode carrying annulus and a plurality of electrode mounting members. The electrode carrying annulus includes an electrode containment sidewall that forms an inner or outer radius of the electrode carrying annulus. The electrode carrying annulus further includes a plurality of radial sidewall projections that project radially away from the electrode containment sidewall. The radial sidewall projections each include an upward-facing tapered spacer including an upward-facing micro-mesa. The electrode mounting members each include a downward-facing tapered spacer including a downward-facing micro-mesa. The electrode mounting members are rotatably engaged with the electrode carrying annulus, and are configured to rotate between a free position and a bracketed position.