Embedded Cooling Channels in Electrodes for Thermal Distortion Control

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Solution Overview

Problem

The uneven heating of electrodes in ion source systems due to ion beam impact leads to thermal distortion, which becomes exacerbated with increasing electrode length, causing irregularities in the ion beam current and potential operational issues.

Innovation Solution

An apparatus with an embedded cooling channel in the electrodes, connected to a fluid source, such as a chiller or heater, and a controller to maintain a predetermined temperature, utilizing additive manufacturing techniques to ensure thermal conductivity and minimize distortion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If electrode length is increased to handle higher ion beam currents, then ion beam processing capability is improved, but thermal distortion increases due to uneven heating

Engineering Contradiction:

Improveion beam processing capabilityVSAvoidthermal distortion

Core Design Contradiction:

ProductivityVSStability of the object's composition

Solution Approach 1:

The electrode is segmented thermally through the integration of multiple cooling channels that divide the thermal management system into distinct zones. This allows different regions of the electrode to be cooled independently, maintaining structural stability while handling higher ion beam currents.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A cooling fluid acts as an intermediary substance that absorbs heat from the electrode through the cooling channels. This mediator transfers thermal energy away from the electrode, preventing thermal distortion while allowing the electrode to maintain its structural integrity for higher current handling.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Stability of the object's composition

If cooling channels are added to the electrode, then thermal distortion is reduced, but device complexity increases

Engineering Contradiction:

Improvethermal distortionVSAvoidelectrode structure

Core Design Contradiction:

Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The cooling channels are merged directly into the electrode structure itself, eliminating the need for separate cooling systems. This integration reduces device complexity by combining thermal management functionality with the electrode's structural components.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The electrode serves multiple functions: it provides the electrical field for ion beam extraction and simultaneously acts as a heat sink through its integrated cooling channels. This multi-functionality reduces the need for additional components, simplifying the overall device structure.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Loss of substance

If electrode temperature is increased to reduce deposition, then deposition rate is reduced, but thermal distortion increases

Engineering Contradiction:

Improvedeposition rateVSAvoidthermal distortion

Core Design Contradiction:

Loss of substanceVSStability of the object's composition

Solution Approach 1:

The cooling system allows precise control of electrode temperature by adjusting cooling fluid flow rate and temperature. This parameter control enables optimization of the temperature to minimize deposition while maintaining thermal stability and preventing distortion.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The cooling system provides thermal feedback control where the temperature of the electrode can be monitored and adjusted by modifying the cooling fluid parameters. This feedback mechanism maintains optimal temperature to reduce deposition while preventing thermal distortion.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus maintains uniform electrode temperatures, reducing thermal distortion and deposition rates, allowing for more stable and efficient ion beam processing by controlling the flow and temperature of the fluid through the cooling channels.

Implementation Method 1

By circulating fluid through the cooling channel, a more uniform temperature may be maintained, limiting thermal distortion

Methodology Applied

Scientific EffectHeat transfer: Convection

Implementation Method 2

the embedded cooling channel is lined with a thermally conductive material

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20240145206A1Temperature controlled electrode to limit deposition rates and distortion

Publication Date: 2024.05.02 APPLIED MATERIALS INC

AI summary

An apparatus for limiting the deposition and thermal distortion of an electrode is disclosed. The apparatus includes a fluid source in communication with a cooling channel that is embedded in the electrode. By circulating fluid through the cooling channel, a more uniform temperature may be maintained, limiting thermal distortion. Further, the cooler temperature of the electrode may also limit the rate of deposition. The cooling channel may be embedded using an additive manufacturing process.