Ion Beam Tubes TRIZ Cases
- Ion beam device
See how a spacer between the cooling stage and gas pot maintains cryogenic cooling efficiency w
- Grooved Cylindrical Repeller for Arc Chamber Heat Uniformity
Striped grooves on a cylindrical repeller improve arc chamber heat uniformity, suppress flakes, and help prevent short circuits.
- Mixed-Gas Plasma Source Flow Control for Precise Partial Pressure
Separate gas lines, controllers, and capillary constrictions enable real-time plasma mixing with less waste and more precise partial pressure control.
- Solid Ion Source Composition for Stable High-Current Implantation
A two-material solid ion source stabilizes metal vapor generation, prevents pipe clogging, and supports higher ion beam current.