Film Target Ion Generation with Induction Heating Surface Cleaning
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Solution Overview
Problem
Existing ion generation devices generate impurity ions like hydrogen ions due to an impurity layer on the target surface, and methods like resistance heating make it difficult to sequentially supply a target for high-intensity ion generation.
Innovation Solution
An ion generation device using induction heating to remove the impurity layer on a conductor layer film target, combined with laser irradiation to generate ions, allowing sequential target supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If resistance heating method is used to remove impurity layer, then impurity layer removal is achieved, but target sequential supply becomes difficult
Solution Approach 1:
The patent replaces the resistance heating method (which requires electrical connections through electrodes) with a laser heating method. The laser beam directly heats the target surface to remove the impurity layer without requiring electrical contacts, enabling the target to be sequentially supplied and replaced without complex electrode connections and disconnections.
2Reliability
If electrodes are formed on target for resistance heating, then impurity layer can be removed, but device complexity increases
Solution Approach 1:
The patent eliminates the need for electrodes by using laser heating instead of resistance heating. The laser beam provides the necessary heat energy without requiring electrical contacts, thereby removing the complexity of electrode formation, connection, and disconnection while maintaining the impurity layer removal capability.
3Temperature
If large electric current is passed through target, then impurity layer is removed by Joule heat, but target cannot be easily replaced
Solution Approach 1:
The patent substitutes the electrical current-based heating method with laser-based heating. The laser beam can be rapidly positioned and activated without waiting for electrical connection setup, enabling faster target replacement cycles and higher productivity while achieving the necessary heating temperature for impurity layer removal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous high-intensity ion generation by rapidly removing impurity layers, preventing impurity ions and facilitating efficient target replacement.
Implementation Method 1
an induction heating section (13) that carries out induction heating with respect to a target (TA) which includes a conductor layer and which is in film form
Implementation Method 2
a laser irradiation section that irradiates the target with laser light so as to generate ions from the target
Implementation Method 3
irradiates the target with laser light so as to generate ions from the target
Implementation Method 4
carries out induction heating with respect to a target (TA) which includes a conductor layer and which is in film form
Data Source
Figure 1
Figure 2
Figure 3(a)~3(b)
AI summary
Provided is an ion generation device that makes it possible to sequentially supply a target to an irradiation region while removing an impurity layer which can be formed on a surface of the target. An ion generation device (10) includes: an induction heating section (13) that carries out induction heating with respect to a target (TA) which includes a conductor layer and which is in film form; and a laser irradiation section (laser light source 15, focusing mirror 16b) that irradiates the target with laser light so as to generate ions from the target, the target having been subjected to induction heating.