GCIB Extraction Voltage Control for Stable Multi-Voltage Beam Tuning
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Solution Overview
Problem
Conventional gas cluster ion beam (GCIB) apparatuses require adjustments in electrode distance and magnetic field strength for different acceleration voltages, leading to instability and exposure to atmosphere, which causes moisture absorption and longer stabilization times.
Innovation Solution
A GCIB apparatus with a separated high voltage power supply and application circuit that applies additional voltage to the extraction electrode and electrostatic lenses, maintaining optimal beam current and shape without changing electrode arrangement or magnetic field strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the acceleration voltage is increased to increase processing speed, then the beam energy increases, but abnormal discharges occur frequently between the acceleration electrode and extraction electrode
Solution Approach 1:
The patent introduces a control mechanism that dynamically adjusts the extraction electrode voltage based on the acceleration voltage. When acceleration voltage increases, the extraction electrode voltage is also increased proportionally, maintaining a constant potential difference ratio. This dynamic adjustment prevents abnormal discharges while allowing high processing speeds.
Solution Approach 2:
The patent changes the electrical parameter (voltage) of the extraction electrode in response to changes in acceleration voltage. By modifying the extraction electrode voltage parameter to match the acceleration voltage level, the system maintains stable operation across different processing speeds without abnormal discharges.
2Reliability
If the distance between acceleration electrode and extraction electrode is increased to reduce abnormal discharges, then discharge frequency decreases, but extraction current becomes insufficient
Solution Approach 1:
Instead of changing the physical distance between electrodes, the patent changes the electrical parameter (voltage) of the extraction electrode. By increasing the extraction electrode voltage to match higher acceleration voltages, the system maintains strong extraction current while preventing abnormal discharges, avoiding the need to adjust electrode spacing.
3Manufacturing precision
If the electrode arrangement is changed for each acceleration voltage to optimize beam current and shape, then beam performance is optimized, but the vacuum vessel must be exposed to atmosphere
Solution Approach 1:
The patent creates a universal control mechanism that works across all acceleration voltages without requiring physical reconfiguration. The extraction electrode voltage is controlled as a function of acceleration voltage, allowing the same electrode arrangement to optimize beam performance at any voltage level, eliminating the need to expose the vacuum vessel to atmosphere.
Solution Approach 2:
The system uses dynamic voltage control to adapt to different operating conditions without physical changes. The extraction electrode voltage automatically adjusts based on the acceleration voltage, providing optimized beam performance across all voltage settings while maintaining the vacuum seal intact.
4Reliability
If the permanent magnet type magnet is used to remove monomer ions, then monomer ion removal is effective at specific voltage, but the magnetic field strength cannot be varied for different voltages
Solution Approach 1:
The patent changes the electrical parameter (voltage) of the extraction electrode to compensate for the fixed magnetic field strength. By adjusting the extraction electrode voltage according to the acceleration voltage, the system maintains effective monomer ion removal across different voltage ranges without needing to change the permanent magnet.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables stable beam performance across a wide range of voltages without exposing the vacuum to atmosphere, allowing for efficient removal of monomer ions and maintaining high current and beam shape.
Implementation Method 1
a gas cluster beam is ionized by electron impact in an ionizer to generate gas cluster ions
Implementation Method 2
the gas cluster ions are extracted as a beam from the ionizer using an extraction electrode
Implementation Method 3
The permanent magnet type magnet 21 included in the beam transport system removes monomer ions
Data Source
AI summary
A GCIB apparatus that can change the energy of ions to be irradiated onto a substrate without changing the electrode arrangement of the GCIB apparatus that have an extraction electrode arrangement optimized for a specific voltage or a permanent magnet type magnet that effectively removes singly charged monomer ions at that voltage, or the magnetic field strength of the permanent magnet type magnet. A separated high voltage power supply that generates a positive or negative high voltage in addition to the first high voltage power supply, the second high voltage power supply and the third high voltage power supply, and a separated high voltage application circuit that applies a positive or a negative separated high voltage supplied from the separated high voltage power supply to the ground electrode of the extraction electrode and the ground electrode portions of the one or more electrostatic lenses.