Electrode Material Pairing for Selective Ion Beam Cleaning
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Solution Overview
Problem
Conventional ion beam processing apparatuses face challenges in selectively removing adhering matter from electrodes due to the same material used for both electrodes, leading to strong adhesion and reduced electrode life, as mechanical cleaning methods cause deformation.
Innovation Solution
The ion beam processing apparatus employs electrodes made of different materials, such as molybdenum and titanium, where the material of the second electrode has a higher dissolution rate than the first electrode, allowing for selective chemical cleaning without mechanical force, and the third electrode is also made differently to facilitate easy cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the first electrode and the second electrode are made of the same material (Mo), then the electrode assembly has good heat resistance and sputtering resistance, but the adhering matter containing the substance of the second electrode strongly adheres to the first electrode, making it difficult to remove during cleaning
Solution Approach 1:
The patent applies different materials to different electrodes based on their specific functional requirements. The first electrode (facing plasma) uses Mo for heat and sputtering resistance, while the second electrode (where ions collide) uses Ti for easier cleaning. This local differentiation allows each electrode to optimize its material properties for its specific operational conditions.
Solution Approach 2:
The patent changes the material parameter of the electrodes from being identical (both Mo) to being different (Mo and Ti). Specifically, it selects Ti for the second electrode based on its reactivity characteristics, allowing the adhering matter to be selectively removed by chemical cleaning solutions that dissolve Ti but not Mo.
2Ease of manufacture
If mechanical cleaning methods are used to remove adhering matter from the first electrode, then the adhering matter can be removed, but the electrode is deformed by the repetition of the cleaning process, reducing its life
Solution Approach 1:
The patent replaces mechanical cleaning methods with chemical cleaning methods. By making the second electrode from Ti, the adhering matter can be removed by chemical solutions that selectively dissolve Ti, eliminating the need for mechanical blasting or scraping that causes electrode deformation and extends electrode life.
Solution Approach 2:
The patent changes the cleaning method from mechanical to chemical by selecting Ti as the material for the second electrode. Ti's specific reactivity allows chemical cleaning solutions to selectively remove adhering matter without applying mechanical stress to the electrode structure.
3Ease of manufacture
If the material of the first electrode is made different from the material of the second electrode, then the adhering matter can be selectively removed by utilizing reactivity, but the electrode assembly requires different materials with different linear expansion coefficients
Solution Approach 1:
The patent assigns different materials to different electrodes based on their specific functional requirements. The first electrode (facing plasma) uses Mo for heat and sputtering resistance, while the second electrode (where ions collide) uses Ti for easier cleaning. This local differentiation allows each electrode to optimize its material properties for its specific operational conditions.
Solution Approach 2:
The patent changes the material parameter of the electrodes from being identical (both Mo) to being different (Mo and Ti). Specifically, it selects Ti for the second electrode based on its reactivity characteristics, allowing the adhering matter to be selectively removed by chemical cleaning solutions that dissolve Ti but not Mo.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables selective removal of adhering matter using chemical processing, reducing electrode deformation and extending the life of the electrode assembly by utilizing reactivity, thereby improving the apparatus's reliability and reusability.
Implementation Method 1
ions flowing out of the plasma in the ion generation chamber to the electrode assembly are accelerated by a voltage difference between the first electrode and the second electrode
Implementation Method 2
an ion generation chamber being configured to generate plasma and thus serving as an ion source
Implementation Method 3
a material of the first electrode is different from a material of the second electrode, and a linear expansion coefficient α1 of the material of the first electrode and a linear expansion coefficient α2 of the material of the second electrode satisfy a relation of α1<α2
Data Source
AI summary
Provided is an ion beam processing apparatus including an ion generation chamber, a processing chamber, and electrodes to form an ion beam by extracting ions generated in the ion generation chamber to the processing chamber. The electrodes includes a first electrode disposed close to the ion generation chamber and provided with an ion passage hole to allow passage of the ions, and a second electrode disposed adjacent to the first electrode and closer to the processing chamber than the first electrode is, and provided with an ion passage hole to allow passage of the ions. The apparatus also includes a power unit which applies different electric potentials to the first electrode and the second electrode, respectively, so as to accelerate the ions generated by an ion generator in the ion generation chamber. A material of the first electrode is different from a material of the second electrode.