Hybrid Aluminum Ion Source With Porous Target Holder Mode Switching
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Solution Overview
Problem
Existing ion sources require multiple units and time-consuming switching to generate ions with different charges, such as singly and multicharged ions, which is inefficient and costly, particularly for materials like aluminum.
Innovation Solution
An indirectly heated cathode ion source with a modular design that includes an insertable target holder and multiple gas inlets, allowing operation in single charge, multicharge, and enhanced modes by controlling the position of the target holder and gas flow, using halogen-containing gases and organoaluminium compounds to produce ions of varying charges.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple ion sources are used to generate ions with different charges, then the ability to produce both singly and multicharged ions is improved, but the device complexity and cost increase
Solution Approach 1:
The ion source is designed to perform multiple functions by switching between different gas inlet configurations. The same ion source structure can generate both singly charged ions (using first gas inlet with halogen-containing gas) and multicharged ions (using second gas inlet with organoaluminum compound), eliminating the need for multiple separate ion sources and reducing device complexity
Solution Approach 2:
The system dynamically switches between different operational modes by controlling which gas inlet is active. The controller can change the ion source configuration in real-time based on processing requirements, allowing transition between single charge and multicharge modes without physical reconfiguration or replacement of components
2Adaptability or versatility
If multiple ion sources are used to generate ions with different charges, then the ion generation capability is improved, but the time required to switch between modes increases
Solution Approach 1:
The single ion source is designed with universal capability to generate both singly and multicharged ions through software-controlled gas inlet selection. This eliminates the mechanical switching or physical replacement time associated with multiple ion sources, as the transition between modes is achieved through electronic control of gas flow rather than physical reconfiguration
3Quantity of substance
If a porous surface is used in the target holder, then vapor entry into the arc chamber is improved, but liquid or molten dopant material passage is prevented
Solution Approach 1:
The target holder incorporates a porous surface with carefully controlled pore sizes that exploit surface tension effects. The porous structure allows vapor molecules to pass through while the pore dimensions are small enough that surface tension forces prevent liquid or molten dopant material from penetrating, thus selectively permitting vapor entry while blocking harmful liquid passage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and cost-effective generation of both single and multicharged ions using a single ion source, minimizing material usage and maintaining plasma purity, with the ability to switch between modes quickly without operator intervention.
Implementation Method 1
a porous surface at a first end, through which vapors from the solid dopant material may enter the arc chamber
Implementation Method 2
The porous surface inhibits the passage of liquid or molten dopant material into the arc chamber
Implementation Method 3
The filament emits thermionic electrons, which are accelerated toward and heat the cathode, in turn causing the cathode to emit electrons into the arc chamber
Implementation Method 4
an arc chamber, comprising a plurality of walls; an indirectly heated cathode disposed in the arc chamber
Implementation Method 5
The cathode and repeller may be biased so as to repel the electrons, directing them back toward the center of the arc chamber
Data Source
AI summary
An ion source that is capable of different modes of operation is disclosed. The ion source includes an insertable target holder includes a hollow interior into which the solid dopant material is disposed. The target holder may a porous surface at a first end, through which vapors from the solid dopant material may enter the arc chamber. The porous surface inhibits the passage of liquid or molten dopant material into the arc chamber. The target holder is also constructed such that it may be refilled with dopant material when the dopant material within the hollow interior has been consumed. The ion source may have several gas inlets. When the insertable target holder is used, the ion source may supply a first gas, such as a halogen containing gas. When operating in a second mode, the ion source may utilize an organoaluminium gas.