Suppression Electrode Distal Edge Heating for Ion Beam Uniformity
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Solution Overview
Problem
The uneven heating of suppression electrodes in ion source systems leads to thermal distortion, affecting the uniformity of the ion beam, particularly as the length of the suppression electrode increases, causing irregularities in the ion beam's shape and current distribution.
Innovation Solution
An apparatus with a heating element to control the temperature of the distal edge of the suppression electrode, using thermal sensors and a controller to monitor and adjust the heat applied, ensuring uniform ion beam distribution by compensating for thermal expansion and distortion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the suppression electrode is made longer to improve ion beam suppression, then the ion beam uniformity deteriorates due to increased thermal distortion
Solution Approach 1:
The patent applies parameter changes by heating the distal edge of the suppression electrode to a controlled temperature, thereby changing the thermal state of the electrode to compensate for thermal distortion caused by ion beam extraction, maintaining optical edge position and ion beam uniformity
Solution Approach 2:
The patent implements preliminary anti-action by pre-heating the distal edge of the suppression electrode before ion beam extraction to counteract the upcoming thermal distortion, creating a thermal gradient that offsets the distortion that would otherwise occur during operation
2Manufacturing precision
If the suppression electrode is heated unevenly by the ion beam, then the optical edge distorts, but adding heating elements increases device complexity
Solution Approach 1:
The patent applies local quality by heating only the distal edge of the suppression electrode rather than the entire electrode, creating a localized thermal gradient that compensates for distortion at the critical optical edge region while minimizing overall system complexity
Solution Approach 2:
The patent implements feedback control by monitoring the position of the optical edge and adjusting the heating power to the distal edge accordingly, maintaining the optical edge at the desired position through closed-loop control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces thermal distortion by over 85%, improving the uniformity of the ion beam and providing a mechanism to fine-tune ion beam profiles, enhancing the precision and efficiency of semiconductor processes.
Implementation Method 1
the suppression electrode may be heated unevenly by these extracted ions... the uneven heating of the suppression electrode may be problematic... thermal distortion of the suppression electrode
Implementation Method 2
thermal sensors in communication with the controller to measure a temperature of at least a portion of the suppression electrode
Data Source
AI summary
An apparatus for improving the uniformity of an ion beam is disclosed. The apparatus includes a heating element to heat an edge of the suppression electrode that is located furthest from the suppression aperture. In operation, the edge of the suppression electrode nearest to the suppression electrode may be heated by the ion beam. This heat may cause the suppression electrode to distort, affecting the uniformity of the ion beam. By heating the distal edge of the suppression electrode, the thermal distortion of the suppression electrode can be controlled. In other embodiments, the distal edge of the suppression electrode is heated to create a more uniform ion beam. By monitoring the uniformity of the ion beam downstream from the suppression electrode, such as by use of a beam uniformity profiler, a controller can adjust the heat applied to the distal edge to achieve the desired ion beam uniformity.