Thermal Isolation Bushing for Ion Source Gas Tube Deposition
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Solution Overview
Problem
The high temperature within ion source chambers, caused by feed gas ionization, leads to excessive heating of gas tubes, resulting in feed gas deposition and reduced system lifetime, necessitating frequent maintenance.
Innovation Solution
A thermally isolating gas bushing, made from materials like titanium, quartz, or zirconia, is placed between the ion source chamber and gas tube to reduce heat transfer, maintaining the gas tube at a lower temperature through a heat sink and allowing for symmetrical flipping to extend its life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the gas tube is directly connected to the ion source chamber, then the feed gas can be supplied efficiently, but the gas tube temperature increases excessively causing feed gas deposition
Solution Approach 1:
A gas bushing made of thermally isolating material (such as alumina, quartz, or ceramic) is introduced as an intermediary component between the ion source chamber and the gas tube. This bushing has an inner channel that allows feed gas flow while its thermally isolating properties prevent heat transfer from the hot ion source chamber to the gas tube, thereby maintaining low gas tube temperature and preventing feed gas deposition.
2Reliability
If the gas tube operates at high temperature, then the ionization process is maintained, but feed gas decomposes and deposits on the tube walls
Solution Approach 1:
The thermally isolating gas bushing acts as a thermal barrier that decouples the temperature regimes of the ion source chamber and the gas tube. This allows the ion source chamber to maintain high temperature for effective ionization while the gas tube remains at lower temperature, preventing feed gas decomposition and deposition on tube walls.
3Productivity
If the gas tube is continuously used at elevated temperature, then the system operates continuously, but the gas tube lifetime is reduced
Solution Approach 1:
By introducing the thermally isolating gas bushing, the system enables continuous operation at high productivity while protecting the gas tube from excessive temperature exposure. The bushing absorbs the thermal stress, allowing the gas tube to operate at lower temperatures and extend its service life.
Solution Approach 2:
The gas bushing is designed as a sacrificial or replaceable component that protects the more expensive gas tube. By making the bushing the thermal barrier, the system allows easy replacement of the bushing instead of the entire gas tube assembly, reducing maintenance costs and downtime.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the gas tube's temperature by up to 200°C, minimizing feed gas deposition and extending maintenance intervals by maintaining the gas tube at a lower temperature, thus reducing maintenance frequency and prolonging operational life.
Implementation Method 1
a gas bushing, made of a thermally isolating material, is disposed between the ion source chamber and the gas tube
Implementation Method 2
the gas tube may be in communication with a heat sink to maintain its temperature
Data Source
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AI summary
A system for reducing clogging and deposition of feed gas on a gas tube entering an ion source chamber is disclosed. To lower the overall temperature of the gas tube, a gas bushing, made of a thermally isolating material, is disposed between the ion source chamber and the gas tube. The gas bushing is made of a thermally isolating material, such as titanium, quartz, boron nitride, zirconia or ceramic. The gas bushing has an inner channel in fluid communication with the ion source chamber and the gas tube to allow the flow of feed gas to the ion source chamber. The gas bushing may have a shape that is symmetrical, allowing it to be flipped to extend its useful life. In some embodiments, the gas tube may be in communication with a heat sink to maintain its temperature.