Ion Gun Magnetic Pole Cover for Stable Discharge Current
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Solution Overview
Problem
The magnetic pole in ion guns is prone to consumption due to plasma exposure, leading to increased maintenance needs, contamination, and reduced discharge current, as the slit gap widens and discharge current decreases.
Innovation Solution
An ion gun design featuring a detachable cover made of electroconductive and non-magnetic materials, such as carbon, that covers the magnetic pole's inner and outer inclined surfaces, preventing exposure to plasma and reducing material consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the magnetic field intensity is increased to improve etching rate, then the etching rate is improved, but the magnetic pole is likely to be consumed due to plasma
Solution Approach 1:
The magnetic pole structure is segmented into a magnetic pole body and a separate cover portion. The cover portion is detachably attached to the magnetic pole and can be replaced independently when consumed by plasma, allowing the magnetic pole body to be reused and reducing overall consumption and maintenance costs.
Solution Approach 2:
The cover portion acts as an intermediary protective layer between the plasma environment and the magnetic pole body. It sacrificially absorbs plasma damage, protecting the main magnetic pole structure from direct consumption while allowing high magnetic field intensity operation for improved etching rate.
2Reliability
If the magnetic pole is consumed, then plasma exposure increases, but the slit gap becomes wider and discharge current decreases
Solution Approach 1:
The cover portion is designed as a sacrificial protective element that absorbs plasma erosion before it can damage the magnetic pole body and alter the slit gap dimensions. This beforehand cushioning maintains dimensional stability and discharge current consistency over extended operation periods.
Solution Approach 2:
The cover portion is designed to be discarded when consumed and replaced with a new cover, while the magnetic pole body is recovered and reused. This approach maintains the critical slit gap dimensions and discharge current stability without requiring replacement of the entire magnetic pole assembly.
3Loss of substance
If the magnetic pole is replaced frequently, then consumption is addressed, but maintenance frequency increases and contamination is generated
Solution Approach 1:
By segmenting the magnetic pole into a reusable body and a replaceable cover portion, the invention reduces maintenance complexity. Only the cover needs frequent replacement rather than the entire magnetic pole assembly, reducing contamination from material handling and simplifying maintenance procedures.
Solution Approach 2:
The magnetic pole body is recovered and reused after the cover is replaced, reducing the frequency of complete replacements. This decreases maintenance frequency and reduces contamination from repeated installation and removal of entire magnetic pole assemblies.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design inhibits magnetic pole consumption, reduces maintenance frequency, and minimizes contamination, maintaining a stable slit gap and discharge current over extended operation.
Implementation Method 1
the magnetic pole is likely to be consumed due to plasma
Data Source
AI summary
An ion gun of the invention includes: an anode; a magnetic pole that has an inner surface facing the anode, a slit provided at a position corresponding to the anode, and an inner inclined surface that extends from an end of the inner surface to the slit and that forms a part of the slit; and a cover that covers at least the inner surface and the inner inclined surface, is formed of an electroconductive and non-magnetic material, and is detachable from the magnetic pole.