Ion beam device
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Solution Overview
Problem
In ion beam devices, the direct physical contact between the gas pot and the cooling stage of the refrigerator leads to vibration transmission, which compromises the convergence of the ion beam and hinders high-resolution observation, while widening the gap between them reduces cooling efficiency and ion radiation angle current density.
Innovation Solution
An ion beam device with a spacer maintaining a gap between the cooling stage and the gas pot, ensuring no direct contact and using a heat conducting medium for efficient cooling, and a method involving a spacer that shrinks in a cooling state to separate the peripheral surfaces, preventing vibration transmission and enhancing cooling performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the gas pot and cooling stage are brought into direct physical contact, then cooling efficiency is improved, but vibration is transmitted to the emitter tip
Solution Approach 1:
A spacer is introduced as an intermediary component between the gas pot and cooling stage. The spacer maintains thermal contact for efficient cooling while providing mechanical isolation to prevent vibration transmission from the refrigerator to the emitter tip assembly.
2Object-affected harmful factors
If the gap between gas pot and cooling stage is widened to prevent vibration, then vibration transmission is reduced, but cooling efficiency decreases
Solution Approach 1:
The spacer acts as a mediator that allows thermal energy transfer while blocking mechanical vibration transmission. It provides a controlled thermal pathway without direct rigid contact, resolving the contradiction between cooling efficiency and vibration isolation.
Solution Approach 2:
The spacer's physical parameters (material thermal conductivity, contact area, geometry) are optimized to provide sufficient thermal conductivity for cooling while maintaining enough mechanical compliance or isolation to prevent vibration transmission.
3Quantity of substance
If the emitter tip is cooled to cryogenic temperature, then ion radiation angle current density is increased, but vibration from freezer compromises observation resolution
Solution Approach 1:
The spacer serves as a vibration-isolating intermediary in the thermal pathway from the refrigerator to the emitter tip. It enables the emitter tip to be cooled to cryogenic temperatures for high ion current density while preventing freezer vibrations from degrading observation resolution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces vibration transmission to the emitter tip, improves cooling efficiency, and increases ion radiation angle current density, enabling higher sensitivity inspections and improved detection reproducibility.
Implementation Method 1
a spacer (59) configured using a material whose volume shrinks in a cooling state with respect to a normal temperature state; causing the spacer (59) to be in the cooling state in a state of being contained in the cooling pot (51)
Implementation Method 2
a cooling stage (57) that cools a cooling pot (51) in the cooling pot (51), which is provided in an ion source chamber (27) so as to be thermally connected to an emitter tip (45)
Implementation Method 3
electrons inside the gases (gas molecules) tunnel through a potential barrier, which has been reduced by the intense electric field, due to a quantum tunneling effect
Data Source
AI summary
In this invention, vibrations generated by a freezer from a cooling mechanism for cooling an ion source emitter tip are prevented from being transmitted to the emitter tip as much as possible, while the cooling capability of the cooling mechanism is improved widely. The ion beam device (10) is equipped with: an ion source housing (22) provided with an emitter tip (45) and defining an ion source chamber (27) supplied with an ionization gas or gas molecules; a gas pot (51) provided in the ion source chamber (27) so as to be thermally connected to the emitter tip (45) and accommodated so as to have no direct physical contact with a cooling stage (57) of a freezer (52); and a spacer (59) provided on the peripheral surface of the cooling stage (57) housed by the gas pot (51) and maintaining a given interval or greater between the peripheral surface of the cooling stage (57) and the internal peripheral surface of the gas pot (52).