Electrode Transporter with Flipside and Transitional Supports

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Solution Overview

Problem

Existing electrode processing technologies face challenges in minimizing contact and reducing handling steps during cleaning and processing of silicon electrodes, particularly for inner disc-shaped and outer ring-shaped electrodes, which affects efficiency and processing time.

Innovation Solution

The use of an electrode transporter with transitional and flipside support elements that immobilize electrodes along gravitational and opposing force vectors, allowing for secure handling and transition between secured and unsecured states, supported by a tripod and facilitated by an electrode removal puck and lifting fork for efficient processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If traditional handling methods are used to process electrodes, then handling steps can be completed, but processing time increases and electrode damage risk increases due to excessive contact

Engineering Contradiction:
Improveprocessing timeVSAvoidelectrode contact damage
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The handling system is segmented into multiple specialized fixtures (transporter with flipside support elements, removal puck, lifting fork) that can be used in sequence for different operations. Each fixture is designed for a specific function, allowing electrodes to be handled with minimal contact at each stage while reducing overall processing time.

Inventive Principle:
Principle #1Segmentation

2Reliability

If multiple handling steps are used to process electrodes, then thorough processing is achieved, but processing time increases and complexity increases

Engineering Contradiction:
Improveprocessing completenessVSAvoidprocessing time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

Multiple handling functions are merged into integrated fixture systems. The transporter combines support elements for different orientations, the removal puck integrates with the lifting fork, and the tripod support system accommodates various electrode configurations. This consolidation reduces the number of separate handling steps while maintaining thorough processing.

Inventive Principle:
Principle #5Merging (Combining)

3Device complexity

If fixed handling fixtures are used, then simple design is achieved, but adaptability to different electrode sizes and shapes is limited

Engineering Contradiction:
Improvefixture design simplicityVSAvoidelectrode size and shape adaptability
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The fixtures incorporate dynamic and adjustable elements. The tripod support system can be configured for different electrode sizes and shapes. The transporter's support elements can be positioned to accommodate various electrode geometries. This dynamic adaptability allows a single fixture design to handle multiple electrode types without requiring completely different fixtures for each size or shape.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution minimizes electrode contact and reduces processing time by enabling secure handling and efficient transition of electrodes during processing, allowing for reduced handling steps and improved exposure to processing fluids.

Implementation Method 1

The flipside support elements are configured to immobilize an electrode along a gravitational force vector normal to a major face of an electrode

Methodology Applied
Scientific EffectGravitational force: Gravitation

Implementation Method 2

The transitional support elements are configured to transition back and forth from a secured state, where the electrode is further immobilized along an opposing force vector opposite the gravitational force vector

Methodology Applied
Scientific EffectOpposing force vector: Force

Data Source

PatentUS8276898B2Electrode transporter and fixture sets incorporating the same
Publication Date: 2012.10.02 LAM RES CORP
  • US8276898B2 patent drawing
  • US8276898B2 patent drawing
  • US8276898B2 patent drawing

AI summary

An electrode transporter is provided comprising a transporter frame, a plurality of transitional support elements, and a plurality of flipside support elements. The flipside support elements are configured to immobilize an electrode along a gravitational force vector normal to a major face of an electrode positioned in an electrode accommodating space defined by the transitional support elements and the flipside support elements. The transitional support elements are configured to transition back and forth from a secured state, where the electrode is further immobilized along an opposing force vector opposite the gravitational force vector, to an unsecured state where the electrode is relatively mobile along the opposing force vector. Additional embodiments relate to the use of a transporter tripod and an electrode removal puck and lifting fork to remove an electrode from the transporter frame.