Single-System Electrolytic Cell for Sulfuric Acid Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing apparatus for electrolyzing sulfuric acid to generate a process solution for cleaning semiconductor or liquid crystal display substrates is complex and large due to separate supply systems for the anode and cathode chambers, leading to decreased concentration and processing ability over repeated use.
Innovation Solution
An electrolytic cell with a single supply system for sulfuric acid, where the acid is supplied to both the cathode and anode chambers through a connection pipe, allowing for efficient electrolysis and generation of an oxidizing agent without the need for dual supply systems, simplifying and miniaturizing the apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If sulfuric acid is supplied to the anode chamber and cathode chamber through different supply systems, then the electrolysis can be performed, but the apparatus becomes complicated and large
Solution Approach 1:
The patent combines the supply systems for the anode chamber and cathode chamber into a single integrated system. The sulfuric acid supply pump connects to a common manifold that distributes acid to both chambers, eliminating the need for separate supply systems while maintaining reliable electrolysis function.
Solution Approach 2:
The single sulfuric acid supply system serves multiple functions: it supplies acid to the anode chamber, supplies acid to the cathode chamber, and maintains proper acid levels in both chambers through the manifold distribution network, replacing what would otherwise require two independent supply systems.
2Reliability
If hydrogen peroxide solution is mixed with sulfuric acid to generate process solution, then the cleaning ability is improved, but the concentration of sulfuric acid decreases greatly
Solution Approach 1:
The system automatically maintains sulfuric acid concentration through continuous electrolysis. As acid is consumed in the process solution, the electrolysis cell continuously generates new acid in-situ, automatically replenishing the concentration without manual intervention or dilution from hydrogen peroxide mixing.
Solution Approach 2:
The patent changes the method of acid generation from chemical mixing (hydrogen peroxide + sulfuric acid) to electrochemical generation (electrolysis of water to produce oxygen and protons). This parameter change maintains acid concentration while achieving the desired oxidizing cleaning ability through controlled electrolysis conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration maintains the concentration and processing ability of the process solution, simplifies the apparatus, and allows for efficient generation of oxidizing agents like peroxomonosulfuric acid, enhancing the cleaning process for substrates.
Implementation Method 1
The sulfuric acid is subjected to electrolysis in the anode chamber, generating a solution containing an oxidizing agent
Data Source
AI summary
An apparatus for electrolyzing sulfuric acid, the apparatus comprising an electrolytic cell comprising a cathode chamber having a cathode and an anode chamber having an anode, the cathode chamber and the anode chamber being separated by a diaphragm, a sulfuric acid tank configured to store the sulfuric acid, a supply pipe connecting the sulfuric acid tank to an inlet port of the anode chamber, a connection pipe connecting an outlet port of the cathode chamber to the inlet port of the anode chamber, a first supply pump provided on the supply pipe and configured to supply the sulfuric acid from the sulfuric acid tank to the cathode chamber through the supply pipe, and a drain pipe connected to an outlet port of the anode chamber and configured to supply to a solution tank a solution containing an oxidizing agent generated by electrolysis in the anode chamber.