Electromagnetic Wave Sensor With Sub-8 μm Features for Lower Reflection
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Solution Overview
Problem
Existing electromagnetic wave sensors face challenges in increasing the sensitivity for detecting electromagnetic waves due to limited transmission rates and high reflection of waves at the substrate interface.
Innovation Solution
The electromagnetic wave sensor employs a second substrate with a protrusion-recess structure on its inner surface, where the distance between protrusion-recess elements is less than 8 μm, and an antireflection film on the outer surface to minimize reflection and enhance transmission of electromagnetic waves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If a flat second substrate is used, then the structure is simple, but electromagnetic wave transmission is limited due to high reflection at the substrate interface
Solution Approach 1:
The patent applies curvature by forming protrusions and recesses on the inner surface of the second substrate, replacing the flat surface with a curved microstructure. This curved surface structure reduces electromagnetic wave reflection and increases transmission by creating gradual impedance transitions, directly resolving the contradiction between maintaining structural simplicity and reducing energy loss.
Solution Approach 2:
The patent changes the surface parameters of the second substrate by introducing protrusions and recesses with specific dimensional parameters (protrusion height of 0.5-2.0 μm, recess depth of 0.5-1.0 μm, center-to-center distance of 2-8 μm). These parameter changes optimize the electromagnetic wave transmission characteristics while managing the increased structural complexity.
2Measurement precision
If the transmission rate of the second substrate is increased to enhance detection sensitivity, then detection sensitivity improves, but reflection losses increase without proper surface treatment
Solution Approach 1:
The curved microstructure of protrusions and recesses on the substrate surface reduces reflection losses, allowing more electromagnetic waves to transmit through the substrate to the detection elements. This directly improves detection sensitivity by increasing the intensity of transmitted electromagnetic waves while minimizing energy loss at the interface.
Solution Approach 2:
The patent applies local quality by creating protrusions and recesses specifically on the inner surface of the second substrate that faces the detection elements. This localized surface treatment optimizes the transmission characteristics at the critical interface where electromagnetic waves enter the detection region, thereby enhancing detection sensitivity without affecting other parts of the device.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design significantly increases the transmission of electromagnetic waves while reducing reflection, thereby enhancing the sensor's sensitivity and efficiency in detecting infrared rays and other electromagnetic waves.
Implementation Method 1
The inner surface has element facing regions that face the electromagnetic wave detection elements. The element facing regions include a protrusion-recess structure. The protrusion-recess structure has protrusion-recess elements that are formed of recesses or protrusions.
Implementation Method 2
As seen in a direction in which the first substrate and the second substrate face each other, a distance between a center of a protrusion-recess element and a center of another protrusion-recess element that is closest to the protrusion-recess element is less than 8 μm.
Implementation Method 3
an antireflection film on the outer surface to minimize reflection and enhance transmission of electromagnetic waves
Data Source
AI summary
An electromagnetic wave sensor has a first substrate; a second substrate that faces the first substrate, that forms an inner space between the first substrate and the second substrate, and that transmits electromagnetic waves; and electromagnetic wave detection elements that are provided in the inner space. The second substrate has an inner surface that faces the first substrate. The inner surface has element facing regions that face the electromagnetic wave detection elements. The element facing regions include a protrusion-recess structure. The protrusion-recess structure has protrusion-recess elements that are formed of recesses or protrusions. As seen in a direction in which the first substrate and the second substrate face each other, a distance between a center of a protrusion-recess element and a center of another protrusion-recess element that is closest to the protrusion-recess element is less than 8 μm.