Electro-Mechanical Transistor With Moveable Channel

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Solution Overview

Problem

Conventional MOSFETs face issues such as the short channel effect and junction leakage current when electronic devices are scaled down, limiting their performance and reliability.

Innovation Solution

An electro-mechanical transistor design featuring a moveable channel, a flexible gate nano-pillar, and dielectric layers that utilize electrostatic forces to establish electrical contact between the source and drain electrodes, allowing for scaling down while maintaining operational reliability through stiction and molecular forces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional MOSFET is scaled down, then device size is reduced, but short channel effect and junction leakage current increase

Engineering Contradiction:
Improvedevice sizeVSAvoidoperational reliability
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent employs a moveable channel structure that can dynamically change position between contact and non-contact states with the source and drain electrodes. This dynamic configuration allows the device to maintain reliable electrical connection when needed while avoiding the short channel effect and junction leakage current that plague scaled-down conventional MOSFETs, thus resolving the contradiction between device size reduction and operational reliability.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The moveable channel acts as an intermediary element between the source and drain electrodes. By introducing this intermediate component that can flexibly contact or separate from the electrodes, the patent eliminates direct junction leakage paths while maintaining controllable electrical connection, thereby improving reliability in scaled-down devices without sacrificing size benefits.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If moveable channel contacts source and drain electrodes, then electrical conduction is established, but device structure becomes complex

Engineering Contradiction:
Improveelectrical conductionVSAvoidstructural complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent utilizes a flexible channel structure made from bendable materials that can conform to the spacing between source and drain electrodes. This flexible thin-film approach simplifies the overall device structure compared to complex mechanical actuation systems, while still achieving reliable electrical conduction when the channel contacts the electrodes through electrostatic or magnetic actuation.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The electro-mechanical transistor effectively addresses the short channel effect and junction leakage current issues, enhancing operational reliability and memory retention capabilities, with improved current-voltage characteristics compared to conventional MOSFETs.

Implementation Method 1

an electrostatic force generated by applying a turn-on voltage to the gate nano-pillar

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

The memory cell may retain a state using stiction force and molecular force so as to maintain physical contact

Methodology Applied
Scientific EffectStiction force: Static Friction

Implementation Method 3

The memory cell may retain a state using stiction force and molecular force so as to maintain physical contact

Methodology Applied
Scientific EffectMolecular force: Van der Waals Force

Data Source

PatentUS8080839B2Electro-mechanical transistor
Publication Date: 2011.12.20 SAMSUNG ELECTRONICS CO LTD
  • US8080839B2 patent drawing
  • US8080839B2 patent drawing
  • US8080839B2 patent drawing

AI summary

An electro-mechanical transistor includes a source electrode and a drain electrode spaced apart from each other. A source pillar is between the substrate and the source electrode. A drain pillar is between the substrate and the drain electrode. A moveable channel is spaced apart from the source electrode and the drain electrode. A gate nano-pillar is between the moveable channel and the substrate. A first dielectric layer is between the moveable channel and the gate nano-pillar. A second dielectric layer is between the source pillar and the source electrode. A third dielectric layer is between the drain pillar and the drain electrode.