Electron Beam Detection Element Diode State Control

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Solution Overview

Problem

Existing electron beam detection elements do not effectively manage diode state transitions and consumption current when the electron gun is in an inactive state, leading to inefficiencies in power usage.

Innovation Solution

Incorporating a control unit that causes diodes to transition from an inactive to an active state in response to changes in the electron gun's state, specifically using control signals to manage the active and inactive states of diodes within the electron beam detection element, thereby reducing consumption current when the electron gun is inactive.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If diodes are kept active to detect electrons, then detection capability is maintained, but consumption current increases during electron gun inactive state

Engineering Contradiction:
Improvedetection capabilityVSAvoidconsumption current
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent applies dynamics by making the diode detection elements dynamically switchable between active and inactive states. The control unit activates diodes only when the electron gun is operating and deactivates them when the electron gun is inactive, transforming a static detection system into a dynamic one that adapts to operational conditions to reduce power consumption.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements periodic action by rhythmically switching diodes between active and inactive states based on the electron gun's operational cycles. During electron beam irradiation periods, diodes are activated for detection; during inactive periods, diodes are deactivated to save energy, creating a periodic on-off pattern that balances detection needs with power conservation.

Inventive Principle:
Principle #19Periodic action

2Use of energy by moving object

If diodes are made inactive to reduce consumption current, then power usage decreases, but detection response time increases

Engineering Contradiction:
Improveconsumption currentVSAvoiddetection response time
Core Design Contradiction:
Use of energy by moving objectVSLoss of time

Solution Approach 1:

The patent applies preliminary action by activating diodes in advance before electron beam irradiation begins and deactivating them immediately after irradiation ends. The control unit synchronizes diode state changes with electron gun state changes, ensuring diodes are already in the correct state (active or inactive) before the corresponding operational phase begins, thus minimizing transition delays.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If diodes are kept active to ensure immediate detection, then detection readiness is maintained, but false detection from dark noise increases

Engineering Contradiction:
Improvedetection readinessVSAvoidfalse detection
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent applies the taking out principle by extracting or removing the harmful effect of dark noise through selective deactivation of diodes. When the electron gun is inactive, diodes are turned off to eliminate the source of dark noise and false detections, while maintaining the capability to be quickly reactivated when needed, thus separating the detection function from the harmful noise generation.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces the consumption current of diodes during the inactive state of the electron gun, enhancing the overall efficiency of the electron beam detection element.

Implementation Method 1

a photodetection apparatus discussed in Japanese Patent Application Laid-Open No. 2013-20972

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS10861688B2Electron beam detection element, electron microscope, and transmission electron microscope
Publication Date: 2020.12.08 CANON KK
  • US10861688B2 patent drawing
  • US10861688B2 patent drawing
  • US10861688B2 patent drawing

AI summary

An electron beam detection element includes a control unit configured to cause a diode to transition from an inactive state to an active state in response to a change of signal level of a control signal for causing an electron gun to change from an inactive state to an active state.