Electron Beam Detection Data Creation for Full Grayscale Use
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing electron beam applicators, such as SEMs, struggle to output detection data effectively utilizing the grayscale range, leading to inaccurate image representation due to uneven detection sensitivity.
Innovation Solution
A method to adjust the light source intensity and emission quantity to match preset values, followed by histogram calculations to allocate grayscale values to light source intensities, ensuring effective use of the grayscale range in detection data creation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If detection sensitivity is adjusted manually or with reference to detection results, then detection sensitivity can be tuned, but a detector with large dynamic range is required
Solution Approach 1:
The patent applies preliminary action by adjusting the light amount before detection to optimize the detection signal. The control unit adjusts the light amount based on the magnification of the irradiated region, ensuring that the detection signal falls within an optimal range before actual detection occurs. This prevents the need for a detector with extremely large dynamic range by pre-conditioning the input signal.
Solution Approach 2:
The patent changes the light amount parameter based on the magnification level. When magnification increases, the light amount is increased proportionally to maintain optimal signal levels. This dynamic parameter adjustment allows the system to adapt to different detection conditions without requiring a detector capable of handling the full extreme range of all possible conditions simultaneously.
2Illumination intensity
If image correction functions are used to brighten or darken images, then image appearance can be adjusted, but the grayscale range is not effectively utilized
Solution Approach 1:
The patent performs preliminary action by creating detection data with effective grayscale range utilization from the start. The control unit adjusts the light amount during detection based on magnification, ensuring that the raw detection data already effectively utilizes the grayscale range. This eliminates the need for subsequent image correction operations that would otherwise waste grayscale values and lose information.
3Device complexity
If light amount is adjusted to make signal intensity a preset value, then detection data can be obtained with small dynamic range, but grayscale range may not be effectively used
Solution Approach 1:
The patent dynamically changes the light amount parameter based on the magnification level. When magnification is high, light amount is increased; when magnification is low, light amount is decreased. This ensures that the detection signal always utilizes the grayscale range effectively while keeping the detector's required dynamic range small. The key is that the light amount adjustment is proportional to magnification, maintaining optimal signal levels across all magnification settings.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables electron beam applicators to output detection data that accurately reflects the sample state, allowing for precise image composition that reflects the actual irradiated region.
Implementation Method 1
a photocathode configured to generate releasable electrons in response to receiving light from the light source
Implementation Method 2
an anode configured to form an electric field between the photocathode and the anode and extract the releasable electrons by the formed electric field to form an electron beam
Implementation Method 3
a first electron beam irradiation step of irradiating an irradiation region of the irradiation target with an electron beam formed in response to receiving light from the light source
Data Source
AI summary
An object is to provide a creation method of detection data used for an electron beam applicator itself to output detection data created with effective use of a grayscale range. The creation method of detection data includes at least two times of detection data output steps. The first detection data output step includes: a first electron beam irradiation step; a first detection step of generating a detection signal; a first light amount adjustment step; a step of repeating these steps; and a first output step. The second detection data output step includes: a first histogram calculation step; a second detection condition setting step; a second electron beam irradiation step based on the set second detection condition; a second detection step of generating a detection signal; a second light amount adjustment step; a step of repeating the above steps; and a second output step.