Electron Beam Attenuation for Imaging Sensor Overexposure Protection

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Solution Overview

Problem

Existing electron imaging systems face challenges in protecting imaging sensors from overexposure, particularly in diffraction mode, due to high beam intensity and the risk of human error, which can lead to permanent damage and reduced signal-to-noise ratio.

Innovation Solution

A system with a beam control device (BCD) that alters the beam intensity by shielding or reducing the beam signal to prevent overexposure, using mechanisms like shutter modulation, partial blocking, and temporal variation to ensure the maximum local current remains within safe limits, and includes features like an electrostatic shutter and attenuator to manage beam intensity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If direct electron detectors are used to increase signal-to-noise ratio, then beam intensity can be reduced to limit sample damage, but the sensor becomes more vulnerable to overexposure and permanent damage from high current density

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidsensor vulnerability to overexposure
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The system performs preliminary evaluation of beam intensity conditions before allowing full sensor exposure. The beam control device assesses whether the incoming beam signal exceeds safe thresholds and preemptively activates protective measures (attenuation or blocking) to prevent overexposure before it occurs

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The beam control device acts as an intermediary between the electron beam and the imaging sensor. It introduces controllable attenuation mechanisms (such as electrostatic shutters or variable aperture devices) that mediate the beam-sensor interaction, allowing the system to maintain high signal-to-noise ratio while preventing harmful exposure levels

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If beam intensity is increased to improve imaging quality, then signal quality improves, but the risk of sensor damage from high peak current increases

Engineering Contradiction:
Improveimaging qualityVSAvoidsensor damage risk
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The system dynamically adjusts beam attenuation in real-time based on measured or estimated beam intensity conditions. The beam control device continuously monitors beam parameters and adaptively modifies attenuation levels, allowing optimal imaging quality while preventing sensor damage through responsive control

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system implements feedback control by evaluating beam signal characteristics and using this information to adjust attenuation settings. The beam control device receives feedback about beam intensity and automatically modifies its attenuation state to maintain safe operating conditions while preserving imaging quality

Inventive Principle:
Principle #23Feedback

3Reliability

If manual beam stop placement is used to block central beam in diffraction mode, then sensor protection is attempted, but human error or misalignment can cause unforeseen high beam intensity to hit the sensor

Engineering Contradiction:
Improvesensor protectionVSAvoidoperator error risk
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The system performs self-protection by automatically evaluating beam intensity conditions and activating attenuation mechanisms without requiring manual intervention. The beam control device autonomously assesses whether the central beam requires blocking and executes protective actions, eliminating dependence on operator skill and attention

Inventive Principle:
Principle #25Self-service

4Reliability

If beam stop is used to block high intensity central beam, then sensor overexposure is prevented, but alignment requirements and system complexity increase

Engineering Contradiction:
Improveoverexposure preventionVSAvoidalignment requirements
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The system replaces mechanical beam stopping with controllable electromagnetic or electrostatic attenuation mechanisms. Instead of relying on physical beam stops that require precise mechanical alignment, the system uses electrically controlled devices (such as electrostatic shutters or variable aperture devices) that can be dynamically adjusted without mechanical alignment constraints

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively protects the imaging sensor from overexposure, prolonging its lifetime and allowing for longer-term exposure without damaging the sensor, while maintaining a high signal-to-noise ratio and dynamic range.

Implementation Method 1

a beam control device (BCD) configured to provide a beam signal based on an incoming beam signal, wherein the beam signal comprises an altered beam intensity

Methodology Applied
Scientific EffectElectrostatic field: Electric Field

Implementation Method 2

using mechanisms like shutter modulation, partial blocking, and temporal variation to ensure the maximum local current remains within safe limits

Methodology Applied
Scientific EffectElectron absorption: Absorption (EM radiation)

Data Source

PatentEP4322199A1System for sensor protection in electron imaging applications
Publication Date: 2024.02.14 FEI CO
  • EP4322199A1 patent drawingFigure 1
  • EP4322199A1 patent drawingFigure 2~3
  • EP4322199A1 patent drawingFigure 4

AI summary

The invention relates to a system for sensor protection in electron imaging applications comprising a beam control device configured to provide a beam signal based on an incoming beam signal, wherein the beam signal comprises an altered beam intensity, wherein the beam control device is further configured to receive a control signal and to activate based on the control signal. The system further comprises a sensor configured to capture the beam signal and to provide a capture signal based on the beam signal, and a control module configured to provide the control signal to the beam control device, to generate an exposure value based on the capture signal and to modify the control signal based on the exposure value.