Electron Beam Stress Measuring Device for Nano-Resolution
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Solution Overview
Problem
Conventional stress measuring methods using Raman spectroscopy have low positional resolution and sensitivity, making it difficult to measure stress concentrations at the nano-level in materials with minute structures, such as nanotubes, and failing to detect high stress concentrations in small areas.
Innovation Solution
The method involves irradiating an electron beam onto a specimen to generate light, analyzing the spectrum shifts between different states of the specimen to calculate stress changes, allowing for high positional resolution and sensitivity by narrowing the beam spot diameter to less than 100 nm, and using external forces to differentiate internal and residual stresses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If Raman spectroscopy is used for stress measurement, then stress can be measured in elastic materials, but the positional resolution is low (about 1 μm)
Solution Approach 1:
The patent replaces the optical laser beam system with an electron beam system. The electron beam can be focused to a much smaller diameter (less than 100 nm) compared to laser beams, thereby achieving higher positional resolution for stress measurement in nanoscale materials without requiring complex optical focusing systems.
Solution Approach 2:
The patent changes the fundamental parameter of the probing beam from optical wavelength (laser) to electron wavelength. This parameter change enables the beam spot diameter to be reduced from micrometer scale to sub-100 nm scale, directly improving positional resolution while avoiding the diffraction limits that constrain laser-based systems.
2Length of stationary object
If laser light is used for stress measurement, then stress can be measured, but the beam spot diameter cannot be narrowed down sufficiently for nanoscale materials
Solution Approach 1:
The patent substitutes the laser light system with an electron beam system. The electron beam can be focused to a diameter of less than 100 nm using electromagnetic lenses, whereas laser beams are limited by diffraction to much larger spot sizes. This substitution directly enables both the narrowed beam spot and the corresponding high positional resolution.
Solution Approach 2:
The patent transitions from optical dimension (wavelength scale) to electron beam dimension (de Broglie wavelength scale). This dimensional change in the probing mechanism allows the beam spot to be confined to nanoscale dimensions, enabling measurement of stress in materials with recurring unit sizes of 200 nm or less.
3Loss of information
If conventional stress measuring methods are used, then average stress can be obtained, but high stress concentration in small areas cannot be detected
Solution Approach 1:
The patent applies local quality by using an electron beam with a diameter of less than 100 nm to probe specific local regions of the specimen. This enables measurement of stress at precisely defined locations rather than averaging over large areas, thereby preserving information about local stress concentrations and their spatial distribution.
Solution Approach 2:
The patent segments the measurement process by using a focused electron beam to probe discrete, small areas of the specimen. This segmentation allows the stress field to be mapped point-by-point or region-by-region, enabling detection of stress concentrations that would be averaged out in conventional full-field measurement methods.
4Measurement precision
If Raman spectroscopy is used, then stress measurement is possible, but stress sensitivity is low and minute stress changes are difficult to measure
Solution Approach 1:
The patent replaces the optical detection system with an electron beam-based luminescence spectroscopy system. The electron beam excitation produces characteristic luminescence from the specimen, and the spectral shifts in this luminescence provide stress information with higher sensitivity than conventional Raman spectroscopy, while using a more compact electron optics system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise measurement of stress at the nano-level with improved positional resolution and sensitivity, allowing for accurate analysis of microscopic portions like carbon nanotubes and micro-machines, and estimating specimen structures based on calculated stresses.
Implementation Method 1
a luminescent phenomenon from the specimen... irradiates an electron beam on a specimen to generate light
Implementation Method 2
a spectroscopy process that analyses light generated from the specimen... and obtains a spectrum
Implementation Method 3
obtains a stress change based on a spectrum shift between a spectrum obtained from the specimen in a predetermined state and a spectrum obtained from the specimen in a state different from the predetermined state
Data Source
AI summary
The stress measuring method of the present claimed invention includes an external force impressing process that applies an external force to a specimen, an electron beam irradiating process that irradiates an electron beam to the specimen, a spectroscopy process that conducts spectroscopy on light generated from the specimen by the above-mentioned electron beam irradiating process so as to obtain a spectrum, and a stress calculating process that obtains a stress based on a spectrum shift between a specimen spectrum obtained by irradiating the electron beam on the above-mentioned specimen and a stress impressed spectrum obtained by irradiating the electron beam on the specimen in a state that a stress exists due to the above-mentioned external impressing process.