Electron Microscope Sample Holder for Simultaneous Optical Probing

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Solution Overview

Problem

Current electron microscopy systems lack the capability for simultaneous structural and optical characterization of nanostructured materials due to space constraints in the sample holder, which prevents the simultaneous application and measurement of electrical potentials and currents with high spatial resolution.

Innovation Solution

An electron microscope sample holder arrangement that integrates optical measurement technology, allowing for simultaneous optical measurements with scanning probe techniques, including a sample holder positioned in the electron beam path, an optical input device to receive light from the sample, and a light guiding system for directing light to the sample, enabling simultaneous structural and optical characterization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If optical measurement technology is integrated into the electron microscope sample holder, then simultaneous structural and optical characterization is enabled, but the device complexity increases

Engineering Contradiction:
Improvecharacterization capabilityVSAvoidsystem complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines optical measurement capabilities (light source, optical fiber, detector) with the electron microscope sample holder into a single integrated system. This merging allows simultaneous structural characterization via electron microscopy and optical characterization via light interaction, enabling comprehensive material analysis without requiring separate experimental setups

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The sample holder is designed to perform multiple functions: it serves as a positioning platform for the sample, an electron beam support for structural imaging, and an optical measurement platform for light interaction studies. This multi-functionality allows a single device to replace what would traditionally require multiple separate instruments

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If optical components are added to the sample holder, then optical measurements become possible, but the space available for other components is reduced

Engineering Contradiction:
Improvemeasurement capabilityVSAvoidsample holder space
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The optical components are nested within the existing sample holder structure. The light source, optical fiber, and detector are arranged in a compact configuration that utilizes the vertical and lateral spaces already present in the sample holder design, allowing optical measurement capabilities to be added without requiring additional horizontal space that would interfere with electron beam access

Inventive Principle:
Principle #7Nested doll (Nesting)

3Adaptability or versatility

If the sample holder is designed for simultaneous optical and electron microscopy, then comprehensive characterization is enabled, but the ease of manufacture decreases

Engineering Contradiction:
Improvecharacterization capabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The sample holder is designed as a modular system with distinct functional segments: an electron beam support structure, an optical component assembly, and a control system. Each segment can be manufactured and tested independently before final assembly, reducing the overall manufacturing complexity while maintaining the capability for simultaneous optical and electron microscopy

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables comprehensive characterization of material properties by allowing for simultaneous high-resolution imaging and optical measurements, increasing the number of measurement possibilities and analysis capabilities.

Implementation Method 1

an optical fiber (7) arranged to transmit light from a light source (3) to a sample (11)

Methodology Applied
Scientific EffectLight transmission through optical fiber: Optical Fibre

Implementation Method 2

an optical detector (4) arranged to receive light from the sample (11)

Methodology Applied
Scientific EffectLight detection: Photoelectric Effect

Data Source

PatentEP2419215B1Optical probing in electron microscopes
Publication Date: 2015.07.01 FEI CO
  • EP2419215B1 patent drawingFigure 1A~1B
  • EP2419215B1 patent drawingFigure 2
  • EP2419215B1 patent drawingFigure 3

AI summary

The present invention relates to an optical arrangement and in particular to an optical arrangement for use in electron microscopy applications. This is used for sample characterization with simultaneous measurement with the electron microscopy of the sample and measurements with an optical setup and/or using a manipulator for probing of a light source or a scanning probe device.