Electroplating Seal Cleaning Arm with Rotatable Cartridge

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Solution Overview

Problem

Current cleaning methods for electroplating system components, particularly the seal, face challenges such as residue buildup leading to conductive surfaces, uniformity issues, and increased operating costs due to manual scrubbing and potential contamination in automated processes.

Innovation Solution

An automated seal cleaning system with a rotatable cleaning head and cartridge assembly that delivers a cleaning solution using a multi-layer fabric pad, ensuring complete wetting and controlled chemical application, along with a rinsing mechanism to prevent fluid exposure to conductive components, and a temperature sensor for monitoring cleaning fluid evaporation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If automated cleaning operations are implemented, then productivity is improved, but contamination of plating baths with chemical cleaners and water injection against contact pins occurs

Engineering Contradiction:
Improvecleaning operation efficiencyVSAvoidcontamination of plating baths
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The cleaning system is divided into separate functional modules: a seal cleaning assembly for cleaning the seal, and a contact pin cleaning assembly for cleaning contact pins. Each module operates independently with its own cleaning mechanisms, preventing cross-contamination between different cleaning operations and protecting the plating bath from contamination.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces intermediary cleaning mechanisms such as a brush assembly and spray nozzle system that act as mediators between the cleaning solution and the components being cleaned. These intermediaries control the delivery and removal of cleaning fluids, preventing direct injection of water or chemicals against contact pins while maintaining effective cleaning.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If manual scrubbing is used, then cleaning quality is improved, but operating costs increase

Engineering Contradiction:
Improvecleaning qualityVSAvoidoperating cost
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The cleaning system is designed to be self-service automated, where the brush assembly and spray nozzle automatically apply cleaning solution and perform scrubbing actions without manual intervention. The system uses its own motor-driven brush and controlled spray mechanisms to perform cleaning operations, eliminating the need for manual labor while maintaining consistent cleaning quality and reducing operating costs.

Inventive Principle:
Principle #25Self-service

3Manufacturing precision

If uniform cleaning is achieved, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:
Improvecleaning uniformityVSAvoidcleaning system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The cleaning system incorporates dynamic elements including a motor-driven brush assembly that can rotate at controlled speeds, and a spray nozzle system that can adjust fluid delivery. The brush assembly can be positioned at different angles and distances from the seal surface, allowing the system to adapt to varying cleaning requirements and achieve uniform cleaning across different areas without requiring an overly complex fixed structure.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system provides improved cleaning uniformity, reduces surface damage, extends the life of cleaning pads, and minimizes the risk of contamination, resulting in more efficient and cost-effective seal cleaning operations.

Implementation Method 1

The cartridge may define one or more apertures configured to deliver a cleaning solution to a pad coupled about the mount cylinder

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Implementation Method 2

a temperature sensor for monitoring cleaning fluid evaporation

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentUS11241718B2Cleaning components and methods in a plating system
Publication Date: 2022.02.08 APPLIED MATERIALS INC
  • US11241718B2 patent drawing
  • US11241718B2 patent drawing
  • US11241718B2 patent drawing

AI summary

Systems for cleaning electroplating system components may include a seal cleaning assembly incorporated with an electroplating system. The seal cleaning assembly may include an arm pivotable between a first position and a second position. The arm may be rotatable about a central axis of the arm. The seal cleaning assembly may include a cleaning head coupled with a distal portion of the arm. The cleaning head may include a bracket having a faceplate coupled with the arm, and a housing extending from the faceplate. The housing may define one or more arcuate channels extending through the housing to a front surface of the bracket. The cleaning head may also include a rotatable cartridge extending from the housing of the bracket. The cartridge may include a mount cylinder defining one or more apertures configured to deliver a cleaning solution to a pad coupled about the mount cylinder.