Electroplating Seal Apparatus Adhesive-Free Composite Design

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Solution Overview

Problem

Conventional electroplating systems rely on expensive, complex machined parts and materials that require adhesives for sealing, leading to high production costs and potential contamination of electrolyte baths during the metallization process of substrates.

Innovation Solution

The use of an annular busbar with a thermoplastic polymer external seal member and a thermoplastic elastomer internal seal member, which form an adhesive-free interphase to support substrates during electroplating, reducing material costs and minimizing contamination by limiting electrolyte ingress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional complex machined parts and specialized materials are used for seals, then sealing reliability is improved, but production cost increases

Engineering Contradiction:
Improvesealing reliabilityVSAvoidproduction cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent uses a composite seal structure combining an external seal member (e.g., PTFE or other fluoropolymer) and an internal seal member (e.g., elastomer or deformable material). This composite approach provides reliable sealing through the complementary properties of each material while using simpler, less expensive materials than conventional specialized seal materials.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The seal is divided into two distinct members: an external seal member that provides the primary sealing interface and an internal seal member that provides additional sealing and support. This segmentation allows each component to be optimized independently using simpler, cheaper materials while maintaining overall sealing reliability.

Inventive Principle:
Principle #1Segmentation

2Reliability

If conventional seal materials and complex machined parts are used, then sealing performance is improved, but device complexity increases

Engineering Contradiction:
Improvesealing performanceVSAvoidseal structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The external and internal seal members are combined in a single integrated seal assembly that works together to provide sealing. This merging simplifies the overall structure compared to conventional multi-component seal systems while maintaining sealing performance through the cooperative function of the two members.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The internal seal member uses a deformable material or elastomer that flexes to conform to the substrate and contact extensions, providing sealing through flexibility rather than precise mechanical machining. This reduces structural complexity while maintaining sealing effectiveness.

Inventive Principle:
Principle #30Flexible shells and thin films

3Ease of operation

If adhesives are used to attach seal components, then assembly ease is improved, but contamination risk increases

Engineering Contradiction:
Improveassembly easeVSAvoidelectrolyte bath contamination
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The internal seal member is retained by the external seal member through mechanical interaction (such as the external seal member containing or holding the internal seal member) without requiring adhesives. This self-retaining design eliminates contamination risk from adhesive materials while maintaining assembly simplicity.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The adhesive layer is completely removed from the seal structure. Instead of using adhesives to attach seal components, the design relies on the mechanical interaction between the external and internal seal members, extracting the harmful adhesive element entirely from the system.

Inventive Principle:
Principle #2Taking out (Extraction)

4Duration of action of stationary object

If expensive specialized seal materials are used, then sealing durability is improved, but replacement cost increases

Engineering Contradiction:
Improvesealing durabilityVSAvoidreplacement cost
Core Design Contradiction:
Duration of action of stationary objectVSEase of manufacture

Solution Approach 1:

The seal members are made from simpler, less expensive materials (such as PTFE, elastomers, or other common polymers) that can be easily replaced. While individual seal members may have shorter service lives than expensive specialized materials, their low cost and ease of replacement make them more economical overall.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent changes the material parameters from expensive specialized materials to more common, less expensive materials such as PTFE, fluoropolymers, elastomers, or deformable materials. These material substitutions maintain sealing durability through proper material selection while dramatically reducing replacement costs.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS11274377B2Seal apparatus for an electroplating system
Publication Date: 2022.03.15 APPLIED MATERIALS INC
  • US11274377B2 patent drawing
  • US11274377B2 patent drawing
  • US11274377B2 patent drawing

AI summary

Electroplating system seals may include an annular busbar characterized by an inner annular radius and an outer annular radius. The annular busbar may include a plurality of contact extensions. The seals may include an external seal member characterized by an inner annular radius and an outer annular radius. The external seal member may be vertically aligned with and extend inward of the contact extensions at the inner annular radius of the external seal member. The external seal member may include an interior surface at least partially facing the contact extensions. The seals may also include an internal seal member extending a first distance along the interior surface of the external seal member from the inner annular radius. The internal seal member may include a deformable material configured to support a substrate between the internal seal member and the plurality of contact extensions.