Electrostatic Chuck Electrode Geometry for Gas Hole Discharge
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Solution Overview
Problem
Existing electrostatic chucks used in semiconductor manufacturing are prone to electric discharges around gas holes, which can lead to burning or melting of the suction target due to uneven voltage distribution and charge accumulation.
Innovation Solution
The electrostatic chuck design features a base body with embedded positive and negative electrodes arranged in a specific pattern around gas holes, where the electrodes' distances from the gas holes are constant except at rounded corner portions, ensuring balanced voltage distribution and preventing electric discharges.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If gas holes are formed in the electrostatic chuck for cooling the substrate, then cooling function is improved, but electric discharge occurs around the gas holes causing burning or melting of the substrate
Solution Approach 1:
The electrode structure is designed with different local characteristics: the first and second electrodes have rounded corner portions at positions facing the gas hole, while maintaining constant distance from the gas hole center in other regions. This local modification of electrode geometry suppresses electric discharge specifically around the gas hole area while preserving the overall electrostatic chucking function.
Solution Approach 2:
The corner portions of the first and second electrodes are rounded rather than sharp, creating a curved geometry at critical positions. This curvature prevents concentration of electric field at sharp corners, thereby suppressing electric discharge initiation around the gas hole while maintaining effective substrate clamping.
2Force
If electrodes are positioned close to gas holes for effective substrate holding, then substrate fixation is improved, but uneven voltage distribution causes electric discharge
Solution Approach 1:
The electrode design incorporates localized rounded corners at positions facing the gas hole, while maintaining constant distance from the gas hole center in other regions. This creates non-uniform electrode geometry only where needed to prevent discharge, while preserving uniform voltage distribution in regions critical for substrate holding force.
Solution Approach 2:
Rounded corner portions are provided at specific locations of the first and second electrodes facing the gas hole. This curvature eliminates sharp corners that would concentrate electric field, thereby preventing discharge while maintaining the electrode-substrate contact pressure needed for effective fixation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively suppresses electric discharges around gas holes, reducing the risk of damage to the suction target by maintaining uniform charge distribution and preventing uneven voltage biases.
Implementation Method 1
an electrostatic chuck configured to suck and hold a suction target
Data Source
AI summary
A positive electrode and a negative electrode face each other with a first gap around a gas hole, face each other with a first path and a second path with the gas hole being interposed therebetween, and face each other with a second gap around the gas hole. The first path and the second path converge to be the first gap at a first end, and converge to be the second gap at a second end. At the first end and the second end, corner portions formed by the positive electrode and the negative electrode are rounded. A first distance between the gas hole and the positive electrode is constant in the first path except the corner portions. A second distance between the gas hole and the negative electrode is constant in the second path except the corner portions. The first distance and the second distance are the same.