Electrostatic Chuck Insulating Component Positioning
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Solution Overview
Problem
Existing electrostatic chucks face issues with positional accuracy of the concave portion on the placing table, leading to potential electric discharge due to a short distance between the power feeding terminal and the base plate, which affects the proper application of voltage and functionality.
Innovation Solution
The design includes a cylindrical insulating component with a protruding portion that fits into a dent portion on the placing table, ensuring accurate alignment and insulation, with a power feeding terminal connected to the electrode via a solder layer or elastic contact, enhancing positional accuracy and preventing electric discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the concave portion is formed in the placing table without a dent portion, then the structure is simple, but the positional accuracy deteriorates and electric discharge may occur
Solution Approach 1:
The placing table is segmented into two functional regions: a concave portion for holding the wafer and a dent portion for precise positioning of the power feeding terminal. This segmentation allows each region to serve its specific function independently, ensuring both structural simplicity and manufacturing precision.
Solution Approach 2:
The dent portion acts as an intermediary feature between the concave portion and the power feeding terminal. It provides a precise positioning reference that mediates the alignment, ensuring the power feeding terminal is correctly positioned relative to the concave portion without requiring complex overall design.
2Volume of moving object
If the power feeding terminal is positioned close to the base plate, then the device size is reduced, but electric discharge may occur due to insufficient insulation
Solution Approach 1:
The cylindrical insulating component serves as an intermediary element between the power feeding terminal and the base plate. It provides electrical insulation while allowing the terminal to be positioned close to the base plate, thus reducing device size while preventing electric discharge.
Solution Approach 2:
The cylindrical insulating component is self-positioning through the dent portion, which guides it into the correct location. This self-service mechanism ensures proper insulation without requiring additional positioning structures or complex assembly procedures.
3Manufacturing precision
If the cylindrical insulating component is added with a dent portion, then the positional accuracy and insulation are improved, but the device complexity increases
Solution Approach 1:
The cylindrical insulating component combines multiple functions: electrical insulation, mechanical positioning (through the dent portion), and structural support. By merging these functions into a single component, the design achieves high positional accuracy without proportionally increasing overall device complexity.
Solution Approach 2:
The cylindrical insulating component is a multi-functional element that simultaneously provides insulation, positioning, and support. This universality reduces the need for separate components, thereby limiting the increase in device complexity while achieving multiple objectives.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution improves the durability and reliability of the electrostatic chuck by ensuring proper insulation and voltage application, even when the concave portion is shifted, and maintains high reliability with increased wafer diameters.
Implementation Method 1
a cylindrical insulating component inserted in the penetration hole, the cylindrical insulating component including a protruding portion protruding from an upper end of the penetration hole
Implementation Method 2
an electrostatic chuck for placing and electrostatically attracting a wafer
Data Source
AI summary
An electrostatic chuck includes a base plate including a penetration hole, a cylindrical insulating component inserted in the penetration hole, the cylindrical insulating component including a protruding portion protruding from an upper end of the penetration hole, a placing table arranged on the base plate, a dent portion formed in a lower face of the placing table, the dent portion in which the protruding portion of the cylindrical insulating component is fitted, a concave portion formed in the dent portion of the placing table, an electrode formed in the concave portion of the placing table, and a power feeding terminal arranged in an inner part of the cylindrical insulating component, the power feeding terminal connected to the electrode.