Electrostatic Chuck Optical Heating Control
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Solution Overview
Problem
The existing substrate fixing devices with electrostatic chucks face a design constraint due to the large number of electric wires needed to control multiple heating elements, which increases the number of through holes in the base plate, reducing the degree of freedom in design and increasing assembly complexity.
Innovation Solution
The electrostatic chuck incorporates a base body with integrated heating elements and current control elements, where the operation of current control elements is controlled by light, allowing for independent temperature control of temperature-controllable regions without the need for extensive external wiring, reducing the number of through holes and enhancing design flexibility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple heating elements are provided in the electrostatic chuck for independent temperature control, then temperature control capability is improved, but the number of electric wires and through holes increases, reducing design freedom
Solution Approach 1:
The patent replaces the electrical control system with an optical control system. Light receiving elements (photodetectors) are embedded in the base plate to receive light signals from the outside, and these optical signals control the heating elements. This substitution eliminates the need for multiple electric wires to pass through the base plate, as the control signals are transmitted optically through light guides or fiber optics that can be routed externally without penetrating the base plate structure.
Solution Approach 2:
The patent introduces light receiving elements and light guides as intermediary components between the external control system and the heating elements. These intermediaries convert external light signals into electrical signals that control the heating elements, allowing indirect control without direct electrical connections through the base plate. This intermediary approach maintains the functional control capability while avoiding the structural complexity of multiple through-holes.
2Ease of operation
If multiple electric wires are led out through the base plate to control heating elements, then independent control of heating zones is achieved, but the area occupied by through holes increases, reducing design freedom
Solution Approach 1:
The patent substitutes electrical signal transmission with optical signal transmission for controlling heating zones. Light guides or optical fibers are used to transmit control signals to light receiving elements positioned near the heating elements. This allows independent control of multiple heating zones without requiring corresponding numbers of electric wires to pass through the base plate, significantly reducing the total area occupied by through holes while maintaining full control capability.
Solution Approach 2:
The patent moves the control signal transmission from a three-dimensional path through the base plate (requiring vertical through-holes) to a surface-level or external optical path. Light guides can be positioned on the surface of the base plate or routed externally, changing the dimensional approach from penetrating connections to surface or external connections. This dimensional shift eliminates the need for deep through-holes and reduces the area occupied by connection points.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces the area occupied by through holes in the base plate, simplifies the assembly process, decreases the number of components, and improves the reliability and yield of the substrate fixing device while maintaining effective temperature control.
Implementation Method 1
Each of operations of the current control elements is controlled in accordance with light radiated toward a corresponding one of the current control elements from an outside of the base body
Implementation Method 2
a plurality of heating elements that are provided in the base body
Data Source
AI summary
An electrostatic chuck is configured to adsorb and retain an object thereon. The electrostatic chuck includes: a base body on which the object is mounted; an electrostatic electrode that is provided in the base body; a plurality of heating elements that are provided in the base body; and a plurality of current control elements that are provided in the base body, and each of which is connected in series with a corresponding one of the heating elements. Each of operations of the current control elements is controlled in accordance with light radiated toward a corresponding one of the current control elements from an outside of the base body.