Electrostatic Chuck and Anti-Separation Frame for Large-Substrate Mapping
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing technologies face challenges in maintaining precision and reducing process dispersion during the manufacturing of large-size light emitting display devices, particularly in securing absolute coordinates and preventing substrate movement or separation during deposition processes.
Innovation Solution
A mapping device with an electrostatic chuck and anti-separation frame is used, featuring a substrate with an alignment pattern, a main frame, and power supply units, which includes frames to stabilize and fix the substrate, ensuring precise alignment and preventing separation, even in large-size apparatuses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large-size substrate is used for mapping device, then the applicability to large-size apparatus is improved, but the substrate separation and positioning stability deteriorates
Solution Approach 1:
The anti-separation frame is divided into multiple frames arranged in a matrix pattern across the substrate surface. Each frame acts as an independent anchoring point, distributing the substrate across numerous fixed positions rather than relying on a single continuous support structure. This segmentation approach maintains positioning stability even as substrate area increases.
Solution Approach 2:
The electrostatic chuck applies electrostatic attraction force to the substrate before and during the mapping process, creating preliminary fixation that prevents substrate separation. This pre-applied holding force ensures the substrate remains stable throughout the subsequent imaging and coordinate correction operations.
2Device complexity
If the substrate is fixed using conventional methods, then the device structure is simple, but the mapping precision and coordinate accuracy deteriorates
Solution Approach 1:
The electrostatic chuck replaces conventional mechanical clamping or adhesive fixation methods with electrostatic attraction force. This substitution eliminates mechanical contact points that could introduce positioning errors or physical deformation, while providing uniform, contactless holding that maintains substrate flatness and alignment pattern integrity for high-precision mapping.
3Reliability
If multiple frames are added to prevent substrate separation, then the substrate stability is improved, but the device complexity increases
Solution Approach 1:
The multiple frames serve multiple functions simultaneously: they act as structural support elements, positioning reference points, and anti-separation anchors. The matrix arrangement provides both mechanical stability and defines the mapping measurement range, eliminating the need for separate components and reducing overall device complexity despite the increased number of frames.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances precision and reduces process dispersion, improving production efficiency by stabilizing large substrates and allowing for accurate coordinate correction, thereby increasing the efficiency of large-size equipment.
Implementation Method 1
an electrostatic chuck under the substrate and being in contact with the substrate
Data Source
AI summary
A mapping device includes: a substrate engraved with an alignment pattern; an electrostatic chuck under the substrate and in contact with the substrate; and an anti-separation frame on the substrate and preventing the substrate from being separated.