Electrostatic Chuck Via Design for Heat Uniformity

The heater electrode is divided into multiple segments arranged in a specific pattern (e.g., concentric circles or radial lines) across the adsorption face. Each segment can be independently controlled to compensate for temperature gradients and achieve uniform heating across the entire surface.

Different regions of the heater electrode are designed with different heating characteristics. For example, the center region may have different heating power or pattern compared to the edge regions, allowing each local area to be optimized for its specific thermal requirements to achieve overall uniformity.

The heater electrode arrangement transitions from a two-dimensional planar layout to a three-dimensional structure by adding vertical layering. Multiple heater layers are stacked at different heights, allowing power feeding portions to be routed through vertical vias and reducing constraints on the horizontal arrangement flexibility.

Multiple heater electrodes are nested within each other in a layered configuration, with inner heaters positioned within the coverage area of outer heaters. This nested arrangement allows efficient use of space and enables flexible power feeding routes through the layered structure.

The multiple heating layers serve multiple functions simultaneously: they provide uniform heat distribution, enable flexible power feeding routes through vertical connections, and create a compact layered structure. The via structures also serve dual purposes of electrical connection and mechanical support.

Multiple heating layers are combined into a single integrated electrostatic chuck structure, with shared support elements and coordinated control systems. The layers work together as a unified thermal management system rather than separate independent components.