Electrostatic Filter Ion Beam Control Asymmetry
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Solution Overview
Problem
Existing ion implantation systems face challenges in maintaining low particle counts on substrates due to material accumulation and contamination from electrodes in electrostatic modules, requiring frequent and costly maintenance.
Innovation Solution
An electrostatic filter module with a novel asymmetric electrode configuration and beam bend design, including an entrance and exit tunnel, effectively captures energetic neutrals and shields electrodes from resputtered material, reducing contamination and maintenance needs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If electrodes are placed close to the substrate in the electrostatic module, then ion beam control capability is improved, but particle accumulation on substrates increases
Solution Approach 1:
The patent applies asymmetry by configuring electrodes in a non-symmetric arrangement within the electrostatic module. The electrodes are positioned at different distances and angles relative to the beam path, creating an asymmetric electric field distribution that optimizes ion beam control while minimizing particle accumulation zones. This asymmetric configuration allows precise beam steering without requiring all electrodes to be equidistant from the substrate.
Solution Approach 2:
The patent introduces a beam bend of at least 30 degrees between entrance and exit axes, adding a dimensional element to the electrode configuration. This angular displacement creates a three-dimensional spatial relationship between electrodes and substrate, allowing the electric fields to control the ion beam in multiple directions while preventing direct line-of-sight paths for particle accumulation.
2Object-affected harmful factors
If frequent maintenance operations are performed to clean electrodes, then particle counts on substrates are reduced, but production time and cost increase
Solution Approach 1:
The patent implements self-service by designing the electrostatic module with a beam bend configuration that causes resputtered material to self-deflect away from electrodes and toward collection surfaces. The asymmetric electrode arrangement and angular beam path create natural particle diversion without requiring external cleaning mechanisms, allowing the system to maintain low particle counts autonomously during operation.
Solution Approach 2:
The patent converts the harmful effect of resputtered material into a beneficial outcome by using the beam bend geometry to redirect these particles away from electrodes. The same angular configuration that provides superior ion beam control also serves to deflect contaminant particles, transforming a potential harm (particle accumulation) into a benefit (reduced maintenance needs).
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces direct and indirect substrate contamination, minimizing the accumulation of particles on the substrate and extending the interval between maintenance operations.
Implementation Method 1
The rod/electrode potentials are set to create electric fields in the electrostatic module causing the ion beam to decelerate, deflect and focus the ion beam
Implementation Method 2
The electrostatic module may accelerate or decelerate an ion beam to a final energy, while altering the direction of the ion beam
Data Source
AI summary
An apparatus may include a main chamber, the main chamber comprising a plurality of electrodes; an entrance tunnel, the entrance tunnel having an entrance axis extending into the main chamber along a first direction; and an exit tunnel, connected to the main chamber and defining an exit axis, wherein the entrance axis and the exit axis define a beam bend of at least 30 degrees therebetween.