Electrostatic Optical Element for Ion Beam Deflection and Focus
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Solution Overview
Problem
Conventional ion implantation systems face challenges in independently controlling the deflection and focus of ion beams due to significant changes in ion energies within beamline components, leading to difficulties in tuning the ion beam size and position.
Innovation Solution
An electrostatic optical element with a series of electrodes of different shapes, including convex, concave, and cylindrical forms, is used to parallelize, deflect, and accelerate/decelerate charged particle beams, with independent voltage/current control enabled by a power supply, allowing simultaneous control of deflection, acceleration/deceleration, and focus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional beamline components are used for ion beam control, then ion beam acceleration and deflection can be achieved, but independent control of deflection and focus is difficult due to coupled voltage requirements
Solution Approach 1:
The electrostatic optical element is segmented into multiple independently controlled electrode groups: deflection electrodes for beam deflection, focusing electrodes for beam focus control, and acceleration electrodes for energy adjustment. Each group can be controlled by separate voltage sources, enabling independent adjustment of deflection and focus without the coupling problems of conventional single-voltage systems.
Solution Approach 2:
The patent introduces an intermediary electrostatic optical element between the ion source and the substrate that acts as a mediator for beam control. This element provides a standardized interface with multiple voltage terminals that can be independently controlled, decoupling the control complexity from the beam manipulation functions.
2Reliability
If deceleration lens is used for filtering energetic neutrals, then beam quality can be improved, but control of deflection angle and beam focus becomes challenging
Solution Approach 1:
The electrostatic optical element is designed with multi-functionality, where the same electrode structure simultaneously performs deceleration, focusing, and deflection functions. By applying different voltage combinations to the electrode terminals, the system can achieve beam filtering while maintaining independent control over deflection angle and focus, eliminating the trade-off present in conventional single-function deceleration lenses.
3Force
If voltage is increased to control deflection, then deflection capability is improved, but beam focus control becomes difficult due to energy dependence
Solution Approach 1:
The system employs dynamic voltage control where the voltages applied to different electrode groups can be independently adjusted based on the desired beam parameters. The control system can dynamically optimize the voltage distribution to achieve the required deflection force while maintaining proper focus, adapting to different beam energies and operational conditions without fixed voltage ratios.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise control of ion beam parameters, resulting in improved ion beam quality and flexibility, allowing for higher quality beams even at low energy outputs, and reduces residual energy contamination.
Implementation Method 1
a second set of electrodes adjacent the first set of electrodes for accelerating or decelerating the charged particle beam along a beamline
Implementation Method 2
a first set of (i.e., one or more) electrodes each having a first electrode shape for parallelizing and deflecting the charged particle beam
Data Source
AI summary
Provided herein are approaches for controlling a charged particle beam using a series of electrodes including a plurality of different shapes. In one approach, an electrostatic optical element includes a first set of electrodes having a first electrode shape for parallelizing and deflecting the charged particle beam using a first set of electrodes having a first electrode shape, such as a concave or convex profile. The electrostatic optical element further includes a second set of electrodes adjacent the first set of electrodes for accelerating or decelerating the charged particle beam along a beamline, wherein the second set of electrodes include a cylindrical shape. In one approach, a power supply is electrically connected to the first and second sets of electrodes, the power supply arranged to enable independent voltage/current control.