Electrostatic Probe Mechanism for Contact Sensing
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Solution Overview
Problem
Existing probe mechanisms for handling small samples in analyzing apparatuses, such as TEM and FIB, face challenges in sensing contact without damaging the sample, requiring high operational skill and potentially applying unreasonable forces, and often necessitate high voltage power sources, which can be detrimental to semiconductor or living samples.
Innovation Solution
A probe mechanism utilizing an electrostatic actuator with a combteeth-shaped electrode structure for enhanced drive force and contact sensitivity, allowing for contact sensing through electrostatic capacitance monitoring, eliminating the need for high voltage and reducing sample damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a needle-like probe is brought into contact with a small sample by manual manipulator operation, then the sample can be inspected or processed, but the operation requires considerable skill and time, and the sample may be damaged by unreasonable force
Solution Approach 1:
The patent replaces the manual mechanical manipulator system with an automated beam member system that uses ion beam forces and elastic deformation to achieve sample handling. The beam member is elastically deformed to press and hold the sample, then drawn to separate it, eliminating the need for skilled manual manipulation while reducing operation time.
Solution Approach 2:
The beam member automatically performs the functions of approaching, contacting, holding, and separating the sample through its elastic deformation characteristics. The system uses the beam's own elastic properties to control the interaction force with the sample, eliminating the need for external manual control and reducing operational complexity.
2Measurement precision
If a high voltage power source is used to drive piezoelectric elements in microtweezers, then the tips can be precisely positioned to pick up small bodies, but the high voltage may damage semiconductor or living body samples
Solution Approach 1:
The patent replaces the piezoelectric actuation system with a beam-based system that uses elastic deformation and mechanical drawing forces. The beam member's tip positioning is achieved through controlled elastic deformation rather than piezoelectric expansion, eliminating the need for high voltage power sources that could damage sensitive samples.
Solution Approach 2:
The patent changes the actuation mechanism from electrical (piezoelectric) to mechanical (elastic deformation). By using the beam's elastic properties and applying mechanical forces through the manipulator, the system achieves precise tip positioning without requiring high voltage, thus preventing electrical damage to samples.
3Reliability
If the probe tip is fixedly attached to the sample piece by CVD deposition, then the sample can be securely held, but the operation time period is extended
Solution Approach 1:
The patent replaces the CVD deposition attachment method with a mechanical holding method using beam elastic deformation. The beam member is elastically deformed to press against and hold the sample piece, providing secure attachment without requiring time-consuming CVD deposition processes.
Solution Approach 2:
The beam member is pre-configured with elastic deformation capabilities that allow it to immediately grasp and hold the sample piece upon contact. This preliminary preparation of the beam's mechanical state eliminates the need for subsequent CVD deposition steps, significantly reducing operation time while maintaining reliable sample holding.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables swift, firm, and efficient handling of small samples without material selection, facilitating precise contact detection and reducing operational complexity while avoiding electrical damage to the samples.
Implementation Method 1
a tip member (1a, 1b) comprising two pieces of needle-like members (1a, 1b) for grabbing a sample, and an electrostatic actuator (2a, 2b) for driving to make the two pieces of needle-like members (1a, 1b) proximate to and remote from each other
Implementation Method 2
means for monitoring a change in an electrostatic capacitance between electrodes of the electrostatic actuator and capable of sensing that the needle-like member is brought into contact with the sample by the monitor
Data Source
AI summary
A probe mechanism and a sample pick up mechanism of the invention are provided at an observing apparatus or an analyzing apparatus and characterized in including a tip member comprising a needle-like member brought into contact with a sample, including a driving electrostatic actuator and means for monitoring a change in an electrostatic capacitance between electrodes of the electrostatic actuator, and capable of sensing that the probe is brought into contact with a sample by the monitor.