Electrostatic Particle Removal Tool Charging in Closed Chambers
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Solution Overview
Problem
Existing particle removal systems require manual charging of particle-removing tools, necessitating the temporary opening of areas to be cleaned, which introduces additional particles and complicates the process.
Innovation Solution
A particle removal system and method that uses a robot-controlled charger to electrostatically charge a particle absorption tool within the closed environment of a semiconductor production apparatus, allowing automated charging without opening the area to be cleaned.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual charging of particle-removing tool is performed, then the tool can be charged with static electric charge, but the area to be cleaned must be temporarily opened which introduces additional particles
Solution Approach 1:
The particle-removing tool is equipped with a charging device that enables it to charge itself automatically using a robot arm, eliminating the need for manual intervention and maintaining the closed environment of the processing chamber
Solution Approach 2:
The manual mechanical charging process is replaced by an automated electrostatic charging system controlled by a robot arm, which can deliver charge without requiring physical access to the charged tool
2Reliability
If manual charging operation is performed, then the particle-removing tool can be charged, but the operation becomes complex and time-consuming
Solution Approach 1:
The system enables automatic self-charging of the particle-removing tool through robot control, eliminating complex manual operations and reducing process complexity
Solution Approach 2:
The controller monitors the charging process and adjusts robot arm movements and charging parameters automatically, simplifying the overall operation through closed-loop control
3Reliability
If manual charging is performed, then the tool can be charged, but production time is lost due to opening and closing the apparatus
Solution Approach 1:
The automated self-charging system operates within the closed chamber without requiring opening/closing cycles, eliminating time loss and maintaining continuous production
Solution Approach 2:
The robot arm and charging device are pre-positioned within the chamber, allowing charging operations to be performed immediately without waiting for apparatus opening
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and automated particle removal without manual intervention, maintaining a clean environment and simplifying the charging process by using a robot-controlled charger to electrostatically charge the particle absorption tool within the apparatus.
Implementation Method 1
a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles
Data Source
AI summary
A particle removal system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles. The particle removal system includes a charger a robot, and a controller. The controller is configured to control operation of the robot to electrostatically charge the particle absorption tool so as to build up the static electric charge by using the charger.