Elemental Mapping With Electron and Ion Beams for Light Elements
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Solution Overview
Problem
Current charged particle microscopy techniques, such as EDS and SIMS, struggle to detect light elements like hydrogen and lithium due to low sensitivity and large interaction volumes, limiting the ability to obtain complete elemental maps, especially in samples like batteries where these elements are critical.
Innovation Solution
Combining electron beam scanning for X-ray emission with ion beam scanning for ion-induced photon emission allows for the detection of a broader range of elements, including light elements, by utilizing a charged particle microscopy system with an ion source and electron source, detectors for X-rays and photons, and a controller to analyze both signals for spatial distribution mapping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If EDS is used for elemental analysis, then heavy elements can be detected, but light elements (atomic number ≤ 11) cannot be detected
Solution Approach 1:
The patent combines EDS detection (for heavy elements) with ion beam induced light emission detection (for light elements) into a single analytical system. The controller coordinates both detection methods to provide comprehensive elemental analysis across the entire periodic table, resolving the limitation of EDS alone which cannot detect light elements with atomic number ≤ 11.
2Measurement precision
If ion beam scanning is used for light element detection, then sensitivity for light elements improves, but device complexity increases
Solution Approach 1:
The patent implements a multi-functional charged particle microscopy system that can perform both EDS analysis and ion beam induced light emission detection using a single instrument platform. The system includes an ion source, electron source, multiple detectors, and a controller that coordinates both modes of operation, allowing the same device to analyze both heavy and light elements without requiring separate instruments.
3Loss of information
If traditional EDS mapping is used, then heavy element distribution can be mapped, but complete elemental maps including light elements cannot be obtained
Solution Approach 1:
The patent enables continuous comprehensive elemental mapping by simultaneously or sequentially performing EDS scanning and ion beam induced light emission scanning across the same region of interest. The controller integrates data from both detection methods to generate complete elemental maps that include both heavy and light elements, providing continuous information about the full elemental composition without requiring separate analysis steps for different element types.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the detection of elements with atomic numbers not greater than 11, achieving higher resolution and sensitivity for alkali metals and trace elements, thereby generating a complete elemental map that traditional methods cannot provide.
Implementation Method 1
scanning a region of interest (ROI) of a sample with an electron beam and acquiring X-rays emitted from the sample
Implementation Method 2
scanning the ROI with an ion beam and acquiring ion-induced photons emitted from the sample
Data Source
AI summary
Methods and systems for imaging a sample with a charged particle microscope comprises after scanning a region of interest (ROI) of a sample with an electron beam and acquiring X-rays emitted from the sample, scanning the ROI with an ion beam and acquiring ion-induced photons emitted from the sample. A spatial distribution of multiple elements in the sample may be determined based on both the acquired X-rays and the acquired ion-induced photons.