Elliptical Chamber Segmentation for Flat Panel Transport
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Solution Overview
Problem
The challenge lies in manufacturing and transporting large electronic device manufacturing chambers for flat panel displays, as conventional chambers exceed size and weight limits, making them difficult to transport and fabricate efficiently.
Innovation Solution
The solution involves assembling multiple chamber pieces with elliptical cross-sectional shapes that fit together to form a non-polygonal, elliptical cylindrical chamber, allowing for larger substrate sizes while adhering to transportation regulations, and utilizing recessed and extended facets for secure coupling and efficient substrate transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the chamber size is increased to accommodate larger substrates, then the substrate processing capability is improved, but the transportation difficulty increases due to exceeding size and weight limits
Solution Approach 1:
The chamber is divided into multiple separate chamber pieces that can be transported individually within size and weight limits. These pieces are then assembled on-site to form the complete large chamber, resolving the contradiction between needing large internal space and maintaining ease of transportation.
2Strength
If the chamber is designed as a single large piece, then the structural integrity is improved, but the manufacturing and transportation complexity increases
Solution Approach 1:
The chamber is segmented into multiple pieces that are manufactured separately and then assembled. This reduces manufacturing and transportation complexity while maintaining structural integrity through proper coupling mechanisms including sealing elements and support structures.
Solution Approach 2:
The chamber pieces are designed to fit together with coupling mechanisms where one piece nests into or connects with another, ensuring proper alignment and sealing while maintaining structural integrity of the assembled chamber.
3Ease of manufacture
If multiple chamber pieces are used to comply with transportation regulations, then the transportation ease is improved, but the assembly complexity increases
Solution Approach 1:
The chamber is divided into transportable segments that can be moved separately, improving transportation ease while the segmentation itself creates assembly complexity that must be managed through proper coupling mechanisms.
Solution Approach 2:
The chamber pieces are pre-assembled into sub-components or pre-positioned with alignment features and coupling mechanisms before final assembly, reducing the complexity of the actual assembly process on-site.
Data Source
AI summary
A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.