Elliptical Airtight Container for LPP Light Source Thermal Management
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Solution Overview
Problem
High-brightness laser-produced plasma (LPP) light source apparatuses face premature deterioration and shortened maintenance cycles due to high temperatures affecting optical components and housing, leading to reduced lifespan.
Innovation Solution
An airtight container with an elliptical shape is used to house assist gas, which is irradiated with laser light to create a plasma, increasing the distance the high-speed gas molecules travel before reaching the container walls, thereby reducing the transfer of heat and preventing crystallization and cracking, while maintaining efficient light transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a spherical airtight container is used to house assist gas, then the structure is simple and compact, but the wall surface temperature increases due to direct laser light exposure, causing crystallization and cracking of the container
Solution Approach 1:
The patent changes the container shape from a symmetric spherical form to an asymmetric elliptical form. The elliptical container has a first curved portion with smaller radius of curvature and a second curved portion with larger radius of curvature, creating asymmetric geometry that prevents direct laser light exposure to the wall surface, thereby reducing temperature increase and preventing crystallization and cracking
Solution Approach 2:
The patent introduces a new dimensional characteristic by using an elliptical shape instead of a spherical shape. This dimensional change in the container's geometric form factor creates a configuration where the laser light path does not directly intersect with the wall surface, adding a spatial dimension solution to the temperature control problem
2Power
If the airtight container wall surface temperature increases, then higher UV power output can be achieved, but the container material crystallizes and cracks, shortening the apparatus lifespan
Solution Approach 1:
The asymmetric elliptical container geometry allows the system to operate at higher UV power levels by redirecting laser light away from the wall surface. The first curved portion with smaller radius of curvature and second curved portion with larger radius of curvature create a light path configuration that prevents thermal damage, enabling sustained high-power operation without crystallization or cracking
Solution Approach 2:
The elliptical container shape acts as an intermediary element that mediates between the laser light source and the wall surface. By introducing this geometric intermediary with specific curvature characteristics, the system can transmit high power laser energy while preventing direct thermal coupling with the container walls, thus protecting the structure from damage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The elliptical shape of the airtight container reduces the wall surface temperature of the light source apparatus, extending its lifespan and allowing for higher UV power output without damaging the container, by minimizing energy transfer and maintaining the glass below its crystallization temperature.
Implementation Method 1
a laser-produced plasma (LPP) light source irradiates laser light to a target material in a liquid or gaseous state and provides EUV light from the target material irradiated with laser light and converted into a plasma state
Implementation Method 2
The LPP light source irradiates laser light to a target material in a liquid or gaseous state and provides EUV light from the target material irradiated with laser light and converted into a plasma state
Implementation Method 3
The elliptical shape of the airtight container reduces the wall surface temperature of the light source apparatus, extending its lifespan and allowing for higher UV power output without damaging the container, by minimizing energy transfer and maintaining the glass below its crystallization temperature
Data Source
AI summary
A light source apparatus includes an airtight container having a hemispherical or semielliptical first curved portion configured to receive laser light, a hemispherical or semielliptical second curved portion opposite to the first curved portion, and a cylindrical portion connecting the first curved portion and the second curved portion; assist gas sealed in the airtight container; and a light source configured to irradiate laser light to the first curved portion from outside of the airtight container.