Elliptical pMUT Arrays for Wideband Ultrasonic Imaging

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Solution Overview

Problem

Conventional piezoelectric micromachined ultrasonic transducer (pMUT) arrays face limitations in bandwidth, which affects axial resolution, and suffer from undesirable crosstalk due to mechanical and acoustic coupling between transducer elements, impacting signal-to-noise ratios in applications like fetal heart monitoring and arterial imaging.

Innovation Solution

The design incorporates independently addressable drive/sense electrode rails and piezoelectric transducer element populations with elliptical membranes of differing semi-principal axes, which increases bandwidth by providing separate resonant frequencies and reduces crosstalk through controlled electromechanical and acoustic coupling between elements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional pMUT arrays use standard piezoelectric membranes, then the device structure is simple, but the bandwidth is limited

Engineering Contradiction:
ImprovebandwidthVSAvoidtransducer element structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies asymmetry by using elliptical piezoelectric membranes instead of circular or rectangular ones. The elliptical shape has different semi-principles axes (first semi-principle axis and second semi-principle axis of different lengths), which creates different resonant frequencies along each axis. This asymmetric geometry enables the transducer array to achieve wider bandwidth by providing multiple separate resonant frequencies from a single membrane structure, thereby improving adaptability without significantly increasing device complexity.

Inventive Principle:
Principle #4Asymmetry

2Productivity

If transducer elements are placed close together to increase array density, then the array size is reduced, but crosstalk between elements increases

Engineering Contradiction:
Improvearray densityVSAvoidcrosstalk
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The patent applies local quality by making each piezoelectric membrane's resonant frequency dependent on its specific geometric dimensions (first and second semi-principle axes). By locally varying the membrane dimensions across different transducer elements, each element operates at a unique resonant frequency. This local differentiation in geometric quality allows close spacing of elements while maintaining reduced crosstalk, as elements with different resonant frequencies experience less mechanical and acoustic coupling interference.

Inventive Principle:
Principle #3Local quality

3Measurement precision

If the pulse length is shortened to improve axial resolution, then the bandwidth must be enhanced, but this increases the difficulty of achieving wide bandwidth in conventional arrays

Engineering Contradiction:
Improveaxial resolutionVSAvoidbandwidth enhancement complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by modifying the geometric parameters (semi-principle axes lengths) of the piezoelectric membranes to create multiple distinct resonant frequencies. By varying these geometric parameters across different elements or within the same element structure, the system achieves wide bandwidth without requiring complex external tuning mechanisms. This direct modification of physical parameters enables the transducer array to provide the necessary bandwidth for short pulse lengths, thereby improving axial resolution while keeping the bandwidth enhancement approach relatively simple.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the bandwidth of pMUT arrays, improving axial resolution and reducing crosstalk, leading to better signal-to-noise ratios and more effective ultrasonic imaging capabilities.

Implementation Method 1

a piezoelectric membrane capable of vibrating in response to a time-varying driving voltage to generate a high frequency pressure wave

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

The same piezoelectric membrane can also receive reflected pressure waves from the propagation media and convert the received pressure waves into electrical signals

Methodology Applied
Scientific EffectConverse piezoelectric effect: Converse Piezoelectric Effect

Implementation Method 3

each of the first piezoelectric membrane and the second piezoelectric membrane having an elliptical geometry with at least first and second semi-principle axes of differing nominal length to provide a plurality of separate resonant frequencies and increase a bandwidth of the pMUT array

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentEP4086011B1Ultra wide bandwidth piezoelectric transducer arrays
Publication Date: 2024.10.16 FUJIFILM DIMATIX INC
  • EP4086011B1 patent drawingFigure 1
  • EP4086011B1 patent drawingFigure 2A~2B
  • EP4086011B1 patent drawingFigure 2C

AI summary

Piezoelectric micromachined ultrasonic transducer (pMUT) arrays and systems comprising pMUT arrays are described. A piezoelectric micromachined ultrasonic transducer (pMUT) array, comprises a plurality of drive/sense electrode rails disposed over an area of a substrate and electrically addressable independently and a plurality of piezoelectric transducer element populations. Every drive/sense electrode within a piezoelectric transducer element population is coupled to one of the drive/sense electrode rails. At least one piezoelectric transducer element in each of the element populations comprises a piezoelectric membrane having an elliptical geometry with at least first and second semi-principal axes (a,b,c) of differing nominal length.