Embedded Semiconductor Structure for Image Sensor Defect Containment
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Solution Overview
Problem
In the semiconductor industry, particularly for image sensors, the challenge lies in preventing dislocation defects at the edges of semiconductor structures, which can lead to electrical defects and pixel leakage, especially in back side illuminated (BSI) image sensors, where the complexity of processing and manufacturing increases with smaller geometric sizes and higher functional density.
Innovation Solution
The solution involves forming a semiconductor device with a second semiconductor structure embedded in a first semiconductor structure, featuring convex and concave portions at its edges, where the length of these portions is greater than their width, effectively constraining dislocation defects within a dummy region and preventing them from entering the active region, thereby enhancing electrical performance and reducing pixel leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the semiconductor structure is made more complex to increase functional density, then the number of interconnected devices per chip area increases, but dislocation defects and pixel leakage increase
Solution Approach 1:
The semiconductor structure is segmented into distinct regions: active regions for photoelectron generation and dummy regions for defect containment. The dummy regions are further segmented with convex portions protruding and concave portions recessed, creating a segmented pattern that isolates dislocation defects within these dedicated zones while preserving the functionality of the active regions, thus maintaining high functional density without compromising reliability.
2Productivity
If the semiconductor structure is made more complex to increase functional density, then the number of interconnected devices per chip area increases, but pixel leakage increases
Solution Approach 1:
The patent converts the harmful effect of dislocation defects into a beneficial design feature by intentionally creating dummy regions with convex and concave portions that serve as defect traps. These regions are positioned to capture and contain dislocation defects, preventing them from propagating into active regions and causing pixel leakage. This transforms the problem of defect propagation into a controlled feature that enhances device reliability while maintaining high functional density.
3Reliability
If convex and concave portions are added to constrain dislocation defects, then defect containment improves, but manufacturing complexity increases
Solution Approach 1:
The patent applies local quality by introducing convex and concave portions only in specific dummy regions rather than throughout the entire semiconductor structure. These localized geometric features are strategically positioned at the edges of active regions where dislocation defects are most likely to occur. The convex portions protrude toward adjacent structures while concave portions recess, creating a localized pattern that provides defect containment functionality only where needed, thus improving reliability without unnecessarily increasing overall structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively prevents electrical defects in the active region of the semiconductor device, ensuring improved pixel performance and functionality by maintaining a suitable ratio of dummy to active areas, thus enhancing the overall operational efficiency of the image sensor.
Implementation Method 1
The second semiconductor structure has at least one convex portion and at least one concave portion at edges thereof, wherein a length of each of the convex portion and the concave portion is larger than a width of each of the convex portion and the concave portion, so that dislocation defects occurring at an edge between the first semiconductor structure and the second semiconductor structure are constrained at the dummy region of the semiconductor device
Implementation Method 2
When light projected into the front side illuminated image sensors or the back side illuminated image sensors, photoelectrons are generated and then are sensed by light-sensing devices in pixels of the image sensors
Data Source
AI summary
A semiconductor device includes a first semiconductor structure and a second semiconductor structure. The first semiconductor structure includes silicon. The second semiconductor structure is embedded in the first semiconductor structure, in which the second semiconductor structure has at least one convex portion and at least one concave portion. The convex portion and the concave portion are on at least one edge of the second semiconductor structure, and a shape of the concave portion includes rectangle, trapezoid, inverted trapezoid, or parallelogram. The second semiconductor structure includes germanium, elements of group III or group V, or combinations thereof. The convex portion of the second semiconductor structure has a top surface substantially coplanar with a top surface of the first semiconductor structure.


